集成电路特征线宽的不断减小对直拉单晶硅片中的缺陷控制和内吸杂技术提出了愈来愈高的要求。
The ever-smaller feature size of integrated circuit imposes on increasingly stringent requirements on the defect control and internal gettering ( IG ) capability of Czochralski ( CZ ) silicon wafers .
集成电路线宽