法拉第杯

本文介绍了真空电弧镀膜（VAD）环境下用法拉第杯分析等离子参数的实验系统。

The experimental system for measuring plasma parameters in vacuum arc deposi-tion by Faraday Cup is introduced .

如果应用一个法拉第杯型离子收集器和一个灵敏的直流放大器来进行离子流测量的话，那么该电离规测量范围在10-10～10-3Pa之间。

If the direct current measurement of the ion current with a Faraday cup type ion collector and a sensitive DC amplifier is used , the gauge is possible to measure the pressure between 10 10 to 10 3 Pa.

文章介绍了对多法拉第杯几何位置的正确定位的实现途径、调试方法和正确定位的判别依据，以及对多接收程序的修正。

This paper introduces the methods of correct locating and adjusting of multi-Faraday-collectors , presents the distinguishing foundation of correctly locating , and modifies the program of multi-collector .

采用标准电压法和峰跳扫描曲线拟合法分别校正了固体多接收器同位素质谱计各个放大器的放大倍数和法拉第杯接收器的接收效率。

The gain and receiving efficiency of every amplifier and Faraday cup of a solid isotope mass spectrometry with Faraday cup multicollector are calibrated by standard voltage method and peak jumping curve fitting method , respectively .