硅基光电子学
硅基光电子学-
近来人们对发展硅基光电子学作出了很大的努力。
Many efforts have been made to develope silicon based optoelectronics .
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随着现代集成光学的发展，特别是硅基光电子学的发展，新型的微纳米级光栅器件由于其结构紧凑、功能多样、制作方便，在现代集成光学中占据了一个重要的位置。
With the rapid development of integrated optics and silicon photonics , the micro / nano grating device has attracted increasing interest due to its compactness , multifunction and easy fabrication .