集成电路用硅

集成电路用硅集成电路用硅
  1. 纳米集成电路用硅及硅基材料的研究进展

    Advancement in the Development of Silicon for Nanometer Grade Integrated Circuits and Silicon-Based Materials

  2. 深亚微米集成电路用硅单晶材料

    Silicon Used for Sub-micro LSI