衬底

在AIN薄层和ZnO薄膜中都没有旋转畴的存在，而且，衬底N化工艺还可以控制薄膜的极性。

Furthermore , the polarity can be controlled by the substrate nitridation .

Si衬底上金刚石薄膜的成核和生长机理

Nucleation and growth mechanisms of diamond film on silicon substrate

金刚石膜在Si（100）衬底上的选择沉积

Selective Deposition of Diamond Films on Si ( 100 ) Substrates

C（60）单晶膜生长与衬底表面结构相关性研究

Study of dependence of c_ ( 60 ) monocrystalline thin films growth on surface structure of layered substrate

Si衬底GaN基LED理想因子的研究

Research on the ideality factor of GaN light-emitting diodes on Si substrate

Si衬底GaN基LED的结温特性

The Junction-temperature Characteristic of GaN Light-emitting Diodes on Si Substrate

Si衬底气相生长金刚石薄膜的成核机制

Mechanism of nucleation of diamond film grown on Si substrate by vapor deposition

用X射线衍射测量了不同衬底温度下薄膜的结构。

The structure of the films under different substrate temperatures was examined by X-ray diffraction .

Si（111）衬底上离子束溅射沉积法生长β-FeSi2薄膜的研究

Formation of β - FeSi_2 film by deposition Fe on Si ( 111 ) substrate

利用真空蒸发法制备ZnO薄膜，衬底材料是镜面抛光石英片。

The ZnO films were synthesized by vacuum evaporation on mirror-polished quartz substrates .

硅衬底碳化对异质外延SiC薄膜结构的影响

Effect of carbonization on the heteroepitaxial growth of SiC films on Si substrates

衬底温度对中频磁控溅射ZnO∶Al透明导电薄膜性能的影响

Substrate Temperature Dependence of the Properties of ZnO ∶ Al Thin Films Prepared by Mid-frequency Sputtering

Si衬底上生长的GaAs薄膜中深中心发光的温度效应

Temperature Effect of Deep Center-Related Photoluminescence in GaAs Thin Films Grown on Si Substrates

导电玻璃衬底上的GaAs薄膜太阳电池设计

Design of GaAs Thin Film Solar Cells on Conducting Glass

硅应力缓冲衬底上GaAs薄层转移探索

Explore of Transfer GaAs thin Layer onto Si Compliant Substrate

对GaAs衬底表面进行氩离子清洗的研究

The investigation of Ar ion irradiation to the surface of GaAs substrate

带衬底偏置的MOSFETCAD模型

A MOSFET Model with Substrate Bias for CAD

用薄靶厚衬底方法测量电子碰撞引起的K壳层电离截面

Measurement of K-shell Ionization Cross Sections Caused by Electron Impact Using a Method of Thin Target With Thick Substrate

探索了n型InP（100）衬底上电化学沉积ZnO薄膜的工艺。

The ZnO thin film is formed by electrochemical deposition on n-InP ( 100 ) wafers .

负衬底偏压热灯丝CVD金刚石膜成核的研究

Nucleation of Diamond by Biased Hot Filament Chemical Vapor Deposition

采用低压MOCVD方法，在（0001）Al2O3衬底上沉积了ZnO薄膜。

ZnO thin films were grown on ( 0001 ) substrate by LP - MOCVD .

有机材料衬底ITO透明导电膜的结构和导电特性研究

Structural and Conductive Properties of ITO Films Deposited on Organic Substrate

X射线衍射结果表明，衬底温度和氧气流量对薄膜的生长有很大的影响。

The results show that the substrate temperature and oxygen flow rate strongly affect the lead oxide growth and its properties .

对氢气和衬底负偏压在B七薄膜低温沉积中的作用进行了研究，发现合适比例的氢气及相应的衬底负偏压，是低温制备上七C薄膜必须的条件。

It was found that proper hydrogen concentration in gas flows and the corresponding substrate bias are the prerequisite for low temperature synthesis of p-SiC film .

发现了Co原子优先吸附在衬底的台阶边缘，并形成纳米团簇。

We found that the Co atoms preferentially adsorbed on the edge of the substrate steps , and formed nano clusters .

0.18μMCMOS工艺栅极氧化膜可靠性的衬底和工艺依存性

Substrate and process dependence of gate oxide reliability of 0.18 μ m dual gate CMOS process

非均匀掺杂衬底MOS结构少子产生寿命的测量

Measurements of Minority Generation Lifetime of MOS Structures with Nonuniformly Doped Substrate

分子沉积（MD）膜对金衬底表面改性的研究

Study in Modification of Au Surfaces by Using Molecular Deposition Films

用于GaN生长的蓝宝石衬底化学抛光研究

Chemical Polishing of Sapphire for Growth of GaN

铝掺杂氧化锌薄膜在玻璃衬底上的RF反应共溅射低温织构生长

Preparation and Characterization of Al Doped ZnO Thin Films Textured on Glass at Low Temperature by RF Reactive Co-Sputtering