真空获得技术
- 网络Vacuum acquisition technology;production of vacuum
真空获得技术-
真空获得技术面临的挑战与对策
New challenge to vacuum acquisition technology and corresponding strategy
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低温抽气是超高真空获得技术的新方法，它具有抽速大、工作压强范围宽、效率高、清洁无污染等特点。
Cryogenic pumping represents the latest method in high and ultra-high vacuum-obtaining technique . It has the advantages of high pumping speed , freedom from hydrocarbon-contamination , and adaptability to a wide range of operating pressure .