扩散炉

本研究首次采用扩散炉进行高温热退火。

A diffusion furnace is used for the first time in the present investigation for high temperature instantaneous thermal annealing .

扩散炉温度自动控制系统中的FPGA设计

FPGA design in temperature monitoring system for diffusion furnace

本论文对快速热扩散炉（RTDFurnace）的设计、制造进行了详细描述，研制出了RTD炉样机。

This dissertation discussed the design and manufacture of Rapid Thermal Diffusion ( RTD ) furnace .

扩散炉基于Laguerre函数模型自适应预测控制

An Adaptive Predictive Control Based on the Laguerre Function Model for Diffusion Furnace

主要报告了扩散炉采用Laguerre函数模型自适应预测控制的结果，并对这种自适应控制的原理及其算法作了简要概述。

The results of applying the adaptive predictive control strategy based on Laguerre model to a diffusion furnace are reported in this paper , and the principle and algorithm of the strategy are briefly introduced .

高温扩散炉恒温区温度的自动控制

Temperature Control in Two-thermostat Areas of Double-Pipe ugh Temperature Diffusing Furnace

基于神经网络的半导体扩散炉温度控制研究

Study on Temperature Control of Semiconductor Diffuse Furnace Based on NN

快速热扩散炉及快速扩散特性研究

Study on the RTD Furnace and its Diffusive Characteristic

扩散炉中石英玻璃管析晶的探讨

A study on the devitrification of silica glass tube in the diffusion furnace

扩散炉计算机自动控制研究

Study on Computer Automatic Control of Diffuse Stove

扩散炉炉体热场研究及加长等温区的方法

Study Heat Field of the Spread Stove Body and Way to Lengthen Isothermal Region

文中还介绍了在实际高温扩散炉上的实验结果，验证了理论结果的正确性。

The test results in a high-temperature diffusion furnace are also described in the paper .

扩散炉炉丝设计原理

Designing principle of the diffuse stove silk

程控扩散炉控制器的设计

Programmable controller design for diffuse - furnace

高精度自动控制恒温扩散炉

High-precision automatic-controlled constant temperature diffusion furnace

扩散炉型等离子化学蒸汽淀积系统生长氮化硅膜的研究

The growth of silicon nitride films by using a diffusion furnace type plasma-enhanced chemical vapor deposition system

在高温扩散炉控制中的应用结果表明，即使在出现强扰动的场合，该算法也能给出良好的控制品质。

Result of the application in a high-temperature spread furnace indicates that the algorithm can give good control performance even under strong disturbance .

本文以微型计算机在半导体扩散炉控制中的应用为例，对上位机监控软件的通讯和组成模块进行了探讨，并使之能与半导体扩散炉组实现高效、可靠通讯。

It is the main topic of this paper to discuss how monitoring software in computer communicates with diffusion tube group efficiently and stably .

电热管式扩散炉在半导体工业中是常用的，本文利用乘子法和脉冲变分原理讨论了扩散炉的炉丝设计问题，给出了设计原理和计算方法。

The tube diffuse stove s of electric heat are applied in semiconductor industry . In this paper , the problems of design of the diffuse stove silk are discussed hy multiplier and calculus of variation principle of pulse , the designing principle arid calculable method are given .

一种提高扩散氧化炉温度控制精度的方法

An Improved Method for Precise Temperature Control of Diffusion / Oxidation Furnace

真空扩散钎焊炉的精确控温系统

Precise Temperature ControlSystem for Vacuum Diffusion Brazing Furnace

真空扩散焊炉的研制

Development of Vacuum Diffusion Bonding Oven

介绍了铝合金扩散焊炉的设计参数及研制过程，并解决了加压装置的设计。

Mainly describe the design parameters of aluminium alloy diffusion and the development process , and also solve the design of pressure device .

本文主要介绍利用DDZ&Ⅱ系列仪表对高温真空扩散钎焊电阻炉实现PID精确控温。

PDZ-II series instruments are used to attain PID precise temperature control for high temperature vacuum diffusion brazing furnace .

浓淡气固两相射流扩散规律研究和炉内防结渣技术一次风反切系统的数值模拟和多相流动特性分析

Experimental Research on the Diffusion Characteristics of the Collisional Rich-lean Gas-solid Multiphase Jet Flow and Slagging Prevention Technology