团簇束
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用离子团簇束及反应离子团簇束技术沉积Zn及ZnO薄膜
Zn and ZnO Films Deposited by Ionized Cluster Beam and Reaction Ionized Cluster Beam Techniques
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Se低能中性团簇束流淀积
Low energy se cluster beam deposition
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利用MeV量级能量的团簇束即可达到GeV重原子离子在物质中的能量沉积密度,在这种条件下,载能团簇与物质作用将成为丰富新现象的源泉。
The extremely high density of deposited energy of GeV heavy ion can be reached with MeV cluster beams . Under this conditions new phenomena should be discovered .
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对于团簇束沉积,当偏压大于一定值时(在本实验条件下偏压≥3kV),薄膜才开始以Mo(110)择优取向生长。
Only for the accelerated voltage higher than a threshold voltage (≥ 3 kV in this experiment ), can the ( 110 ) oriented Mo thin film by the cluster beam deposition grow up .
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荷能团簇束成膜的表面迁移和附着特性的研究
A study on the properties of surface migration and adhesion during energetic cluster impact deposition
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载能钼团簇束与单晶硅碰撞室温下合成二硅化钼
Synthesis of MoSi_2 by energetic molybdenum cluster beam deposited on monocrystalline silicon at room temperature
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铜团簇束在硅上碰撞沉积的薄膜表面能谱分析
The analysis of XPS spectrum of thin films formed by Cu cluster beam deposited onto Si substrate
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特别是低能团簇束沉积(LEBCD)组装纳米薄膜已成为材料科学研究的热点之一。
Especially assembling nano-film by low energy beam of cluster deposition has become one of the hot topic in material science .
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MeV原子团簇离子束的产生、鉴定及其与固体的作用
Production , identification of MeV atomic cluster beams and their interactions with solids
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一个高密度连续射流团簇离子束源
A High Intensity Continuous Cluster Ion Source