离子铣
- 网络ion milling
离子铣-
采用金属转移剥离技术及离子铣技术在铝酸镧衬底上刻蚀出坡度角大于70°陡直台阶。
The steep step with the gradient angle more than 70 ° has been fabricated by means of metal transfer lift-off and ion-etching techniques .
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自集成透镜InGaAsP/InPDHLED及其离子束铣技术巧铣凸轮
A novel integral lensed InGaAsP / InP DH LED and ion-beam milling technigue Milling the Cam Skillfully
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衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
DOE 's fabrication techniques mainly include laser beam or electron beam writing , RIE , ion milling and thin film deposition .