带电粒子活化分析
dài diàn lì zi huó huà fēn xī
- 名charged particle activation analysis
带电粒子活化分析-
应用带电粒子活化分析法（CPAA）对硼薄膜中的氧含量进行了测量，并对利用厚标样分析薄样品中的元素含量的比较测量方法进行了研究。
Using Charged Particle Activation Analysis ( CPAA ), the concentration of oxygen in a thin boron target was determined , and the method of analyzing the thin unknown sample in comparison with the thick standard was studied .
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通过红外吸收测量、带电粒子活化分析及腐蚀后的金相观察，证实了经三步热处理退火后的CZ硅片，表面层氧外扩散而形成清洁区，体内氧沉淀形成高密度的缺陷区。
The variation of the state of oxygen in CZ silicon wafer and the distribution of precipitate are studied by infrared absorption measurement , charged-particle analysis and etching metallographic examination .
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仪器带电粒子活化分析
Instrumental charged-particle activation analysis