纳米加工

因此，如何把AFM检测与传统加工方法结合起来，对于AFM纳米加工技术的发展和应用具有一定的意义。

Therefore , it is meaningful that combine AFM detection and conventional machining methods for the development and application of AFM-based nanolithography techniques .

纳米加工是纳米技术的核心，也是实现下一代纳米器件的关键。

Nanofabrication is the key issue of nanotechnology , and also the critical event of achieving the invention of nanometer device .

AFM诱导氧化脉冲宽度与Si纳米加工

Pulse Duration of AFM Induced Oxidation and Si Nano-Fabrication

采用AFM研究单晶硅纳米加工特性

Investigation on Nano - machining Characteristics of Silicon by AFM

AFM在不同参数下实现阳极氧化纳米加工

Anodic Oxidation Nano-Fabrication at Different Parameters by AFM

AFM纳米加工系统设计

Nano-fabrication system based on atomic force microscopy

纳米加工平台X-Y方向运动的数模控制策略

Modeling and Control for Analog Inner Loop and Digital Outer Loop of Nanotechnology-stage in X-Y Direction

在扫描探针纳米加工技术的基础上，提出了利用原子力显微镜（AFM）来制作高频光栅的新工艺。

On the basis of micro-fabrication technique using the atomic force microscope , a new method was proposed for producing high frequency grating .

本文介绍了在AFM针尖与氢钝化硅表面之间施加电场作用对硅表面进行修饰的纳米加工方法，重点讨论了加工机理。

In the paper a kind of patterning method was studied with voltage applied between the AFM tip and sample with emphasis on its mechanism .

自原子力显微镜（AFM）问世以来，其应用领域已由原来的微观表面形貌检测或表面特征的表征扩展到纳米加工。

Atomic force microscope ( AFM ) has been applied in the field of nano-machining since its invention even its main function falls in the inspection of surface topography and other features .

其次，构建了STM纳米加工系统，用VB编制了相应的电场加工控制软件，提高了对加工过程的操作性和可控度。

Secondly , the system of STM-based nano-fabrication is constructed , and its related manipulative system is programmed in VB environment , improving the operability and controllability of the process of fabrication .

提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。

A novel MOEMS spatial resonator based on micro-nano machining technology was put forward . The principle and structure of the resonator were introduced .

首先实现了AFM纳米加工系统的Z向闭环加工方式，运用研制的加法器电路实现开环加工方式与闭环加工方式的切换。

First of all , a Z direction closed-loop control approach had been achieved in the AFM nano-machining system by using the adder circuit , through which the closed-loop control method and the open-loop control method can be switched .

在此基础上，应用有限元法对AFM纳米加工中存在于金刚石针尖和被加工材料之间的接触作用机制进行了计算仿真。

Beyond that , the contact mechanism existed between the AFM diamond tip and the material surface is simulated by finite element method . The experimental results prove the FEM 's validity applied in the contact analysis .

压电陶瓷扫描管在纳米加工中的应用压电免疫传感器

The Application of a Piezoelectric Tube Scanner in Nanometer Structure Fabrication

对冰盘抛光纳米加工进行了较为深入的分析与探讨。

Nano-machining of ice-desk polishing has been further analysed and discussed .

面向微纳器件的纳米加工装备与组装工艺的研究

Study on Nano-processing Equipment and Nano-assembly Processes of Micro-nano Device Oriented

微纳米加工与检测技术进展

Progress of Micro - Meso Mechanical Manufacturing and Measurement Technology

液流悬浮超光滑纳米加工试验

Experimental Research on Hydrodynamic Suspension Polishing for Nano-scale Ultra-smooth Surface

基于微/纳米加工技术的微型电化学免疫传感器研究

Micro Electrochemical Immunosensor Based on Micro / Nano Fabrication Technology

微纳米加工技术在纳米物理与器件研究中的应用

Applications of micro / nanofabrication in nanoscale physics and devices

利用光镊系统实现纳米加工的理论和实验研究

Study of theory and experiment on implement of nano-machining using optical-tweezer system

纳米加工研究尺寸稳定性好；

RESEARCH OF NANOMETER SCALE MACHINING good dimensional stability ;

微米/纳米加工中的聚焦离子束技术

Micro - / Nano-Fabrication Using Focused Ion Beam Technology

超精密加工与纳米加工技术是现代制造技术的前沿，随着加工精度的不断提高，对超精密加工机床的性能要求也随之提高。

Ultra-precision machining and nanotechnology are at the forefront of modern manufacturing industry .

材料的微观性能对纳米加工表面质量的影响

Effect of Workpiece Micro-properties on Nanometer Surface Quality

微纳米加工表面和表层的完整性评价

Comprehensive Assessment of Micro-nano Surface and Sub-surface Integrity

纳米加工和材料去除机理研究

Research on nano-cutting and mechanism of material removal

微纳米加工技术及其应用综述

Overview of micro / nanofabrication technologies and applications

蓝宝石单晶纳米加工技术的研究

The Nanometer Machining Technique of Sapphire Single Crystal