高温压力传感器

针对MEMS高温压力传感器产业化发展过程中的批量化键合工艺需求，从分析压力传感器键合工艺入手，研究批量组装关键技术，最后进行系统集成研制MEMS压力传感器批量组装设备。

This paper , which aims at key patch bonding technique of MEMS high temperature pressure sensors , develops and integrates a batch assemble system for MEMS pressure sensors .

静电键合在高温压力传感器中的应用

Application of Anodic Bonding for High Temperature Pressure Sensors

C高；高性能高温压力传感器

High-performance high-temperature pressure sensor

MEMS高温压力传感器若干关键技术的研究

Research on some Key Techniques of MEMS High Temperature Pressure Transducer

SiC薄膜高温压力传感器

High temperature pressure sensor based on SiC films

MEMS高温压力传感器研究与进展

Research and Progress of MEMS High-temperature Pressure Sensors

智能剥离SOI高温压力传感器

High Temperature Pressure Sensor Fabricated with Smart Cut SOI Materials

一种新型单晶硅SOI高温压力传感器

A New Type High-temperature SOI Monocrystal - silicon Pressure Sensor

用于高温压力传感器的AlN绝缘膜的研究

Study of AlN Insulated Film for High Temperature Pressure Sensor

SOI高温压力传感器的研究现状

The Research Status of SOI High-temperature Pressure Sensor

对电路的工作过程进行了计算机仿真和试验，并给出了微型高温压力传感器的MEMS工艺设计流程。

The circuit is simulated and tested . And the MEMS process of the high temperature micro pressure sensor is designed .

单晶硅SOI高温压力传感器是一种新型高性能高温压力传感器。

High temperature SOI Monocrystal silicon Pressure Sensor is a new type high temperature pressure sensor with high performances .

基于SIMOX技术的高温压力传感器研制

Development of High Temperature Pressure Transducer Based on the SIMOX Technology

经测试3C-SiC高温压力传感器具有良好的性能指标。

Through testing , 3C-SiC high temperature pressure sensor has good performance .

根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅SOI高温压力传感器芯片。

According to the result of simulation and characteristic of monocrystalline silicon SOI structure , a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed .

实验结果表明，实际测试和模拟得到的数据比较接近，SOI高温压力传感器完全符合设计要求；

The experiment results indicated that the test results is similar to the simulation results , it is suggested that the design of high temperature SOI pressure sensor was rational .

一些特殊的材料如SiC、SOI等可以用来制作高温压力传感器，但是由于成本较高或加工难度大等原因，尚未得到广泛应用。

Some special materials such as SIC , SOI can be used to manufacture high temperature pressure sensor , but due to the difficult process or / and cost , they are not used widely .

研制出的SIMOX高温压力传感器具有结构简单、与半导体工艺兼容、适用于大批量生产等特点。

The SIMOX high temperature pressure transducer is provided with the follow good characteristics : sample structure , compatible with semiconductor process , fit to mass producing .

另外对SOI压力传感器和多晶硅压力传感器进行比较，发现单晶硅SOI高温压力传感器灵敏度比多晶硅高温压力传感器灵敏度有较大提高。

Comparing with poly-Si pressure sensor with the same layout design and process parameters , the SOI pressure sensor had a good property of high-temperature , and the sensitivity of SOI pressure sensor was much higher .

本文研制出了压力满量程为0～1MPa、工作温度范围在0～220℃的SOI高温压力传感器。

The SOI pressure sensor was developed in this paper . The full scale of the pressure sensor is between 0-1 MPa , and the temperature range is between 0-220 ℃ .

绝缘体上硅高温压力传感器研究

Study on High-Temperature Piezoresistive Pressure Sensors Based on Silicon on Insulator

高温压力传感器的力敏电阻条的制备

Fabrication of force-sensitive resistor strip for high temperature pressure sensor

介绍了一种新型金刚石高温压力传感器的优化设计方法。

Optimum design considerations for poly diamond piezoresistive pressure sensors are demonstrated .

基于硅隔离技术的耐高温压力传感器研究

Research of High Temperature Pressure Transducer Based on the Silicon on Insulator Technology

多晶硅集成高温压力传感器研究

Research on Poly-Silicon Integrated Pressure Sensor for High Temperature

高温压力传感器现状与展望

Status Quo of High-Temperature Pressure Sensor and Its Prospect

高温压力传感器冷却套温度场的有限元法计算

Finite Element Method of Calculating Temperature Field at Cooling-Jacket of High Temperature Pressure Sensor

高温压力传感器的温度补偿

Temperature compensation of the high temperature pressure sensor

多晶硅高温压力传感器设计

Design for High-temperature Polysilicon Pressure Sensors

列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。

Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced , whose principles and characteristics are discussed .