致动器

V型电热硅微致动器静态性能测试结果表明，微致动器硅梁电阻值在工作电压范围内不随温度升高而变化。

The statical testing results of the actuator indicate that the resistance of silicon beam is a constant in the range of operation voltage .

并通过试验建立了几种微机械性能参数测试方法，并据此对V型电热硅微致动器的一些静态和动态性能参数进行了测试。

Several testing methods of micro scale mechanical behavior parameters are established by test . Statical and dynamic performance parameters of the electrothermal actuator are acquired .

提出了V型电热硅微致动器的弯曲振动力学模型。

A flexural oscillation model about V-shaped silicon electro-thermal microactuator is presented .

基于DSP的全数字电气传动控制板的研制电动气动致动器；电动气动装置；电动气压传动

Research to Manufacture the Digital Control Unit Which is Used in Electric Drive System by DSP ; electropneumatic actuator

以BP神经网络、随机有限元法为基础，对U型电热微致动器进行了仿真分析。

The U-shaped flexural electro-thermal actuators were simulated based on the BP artificial neural network and stochastic finite element method .

对基于PZT压电薄膜的变形镜致动器的结构进行了分析，优化了结构参数和驱动方式。

PZT thin film based deformable mirror actuators are analyzed .

接着研制了压电陶瓷致动器（PZT）的驱动电源。

Then the driven source of PZT is developed .

运用能量法推导并建立了一种V型悬臂粱电热微致动器的力学模型。利用该力学模型得到了致动器的力学特性，并且与相关的实验结果进行了对比。

A novel mechanical model is described for predicting the static behaviour of the V shaped cantilever thermal actuator , in which the energy approach is employed .

面向主动流动控制研发了气泡型微致动器及其阵列技术和MEMS合成射流器技术。

Based on MEMS technology , micro balloon actuator arrays and synthetic jets were developed for active control of flow over an airfoil .

再次，使用ANSYS有限元软件计算分析了硬盘驱动器致动器悬架和硬盘驱动器整体的模态，得到了硬盘振动的固有频率和模态振型；

Thirdly , the mode of HDD and its suspension are calculated using ANSYS , the natural frequency and modal vibration shape are obtained in the form of animation .

试验结果还表明V型梁电热杠杆式体硅纳米致动器能够实现纳米致动，且移动位移可控。

The testing results also shows the nano motion could be achieved with the bulk nano actuator driven by single V-shape beam electrothermal actuator and the platform can be controlling moved in nano step .

系统地调研和分析了硅微机械扭转镜光致动器及MEMS动态测试技术研究的重要意义、应用领域、研究现状和发展趋势。

The importance , application field , current status and development trends of the silicon-based MEMS torsion-mirror optical actuator and the MEMS dynamic testing technique are investigated and analyzed fully .

理论计算结果表明，V型电热硅微致动器固有频率是随硅梁宽度的增加而线性增大，随斜梁长度增加而非线性减小，随斜梁倾角增加而非线性增大。

Theoretical calculation results indicate that the natural frequency is proportional to the width of silicon beam , increased nonlinearly with the rake angle of oblique beam , and reduced nonlinearly with the length of silicon beam .

分析了Casimir力对旋转式纳电子机械（NEMS）致动器动态稳定性的影响。

The influence of Casimir force on the stability of electrostatic torsional nano-electro-mechanical systems ( NEMS ) actuators is analyzed .

总督我发展，主要是基于控制箱及致动器电机著名的R22的直升机。

The governor I 'm developing in mainly based on the control box and actuator motor of the well known R22 helicopter .

计及Casimir效应时，旋转式致动器失稳时的临界倾角和临界电压和结构的几何尺寸有关。

The dependence of the critical tilting angle and voltage is investigated on the sizes of structure taking Casimir effects into the consideration .

为满足航天应用的需要，本文对EAP材料研究情况和它们典型的压电致动器放大结构发展趋势进行了综述。

To meet the requirements of space applications , technical state of EAP materials and its typical amplification architectures of piezoelectric actuators are reviewed in this paper .

微致动器作为微电子机械的核心驱动元件，一直都是MEMS研究的热点和突破点，并在一定程度上成为衡量MEMS发展水平的重要标志。

As the core actuation component , the micro actuator has been the MEMS research hot spot and the breakthrough point in MEMS research , and becomes an important symbol of the develop-level in MEMS research to a certain extent .

RE-GMM致动器设计方法研究

The Research on Design Means of RE-GMM Actuator

基于LaRC-MFC致动器的振动主动控制研究

Research on Active Vibration Control Based on LaRC-MFC Actuator

该微泵利用压电双晶片作为致动器，以PDMS膜作为泵膜，以各向异性体硅腐蚀形成的锥形孔作为扩散口／喷口结构。

The piezoelectric bimorph is used as the actuator , PDMS film is used as the pump membrane , and the cone-shaped aperture fabricated by anisotropic bulk silicon etching is used as the diffuser / nozzle structure .

单路输出电流大于20mA，驱动脉宽在5~200μs内连续可调，可实现多个串联的压电陶瓷致动器并行驱动。

The width of driving pulse is continuous adjustable during range of 5 ~ 200 μ s. This power can drive a number of piezoelectric ceramics actuators in series simultaneously .

由于压电薄膜（PVDF、PZT）材料近来的问世，从而促进了分布式振动控制方法的出现和发展，这就是在柔性结构上下表面分别结合两层压电薄膜，作为分布式传感器和分布式致动器。

The recent presence of piezoelectric film ( PVDF , PZT ) promotes the development of distributed vibration control method . This method needs two pathes of piezoelectric films sticked on the top and bottom of the flexible structure being the sensor and actuator respectively .

由外部扬声器产生的噪声通过柔性墙的振动进入闭合空间内部，并通过粘合在柔性墙上的压电陶瓷（PZT）致动器和压电薄膜（PVDF）传感器来实现主动控制。

The noise produced by the outside speaker radiates into the enclosure through the vibration of the flexible panel . And via the piezoceramic ( PZT-5H ) actuator and piezoelectricity diaphragm ( PVDF ) sensor located on the flexible panel to realize the active control .

使用Festo的仿生材料分类闸，以Festo的流体肌肉为致动器，一步程序就可以把材料系统地分成七部分。

Seven parts can be systematically sorted in a single procedure with the bionic material sorting gate from Festo , with Festo fluidic muscles as actuators .

该致动器存在两个共振频率，在共振频率下工作，方波分别出现了4.70m/s和4.22m/s的峰值。

When the actuator is actuated with a square wave , the corresponding mean velocities are 4.70m/s and 4.22m/s .

利用TSI-IFA300热线风速仪系统对致动器喷口外的流场进行了测量。

The measurement of velocity of the jet flow field is carried out with the TSI-IFA300 constant temperature anemometer .

现阶段国内外的触觉显示器结构复杂、体积大、不便于携带。针对这些缺点，本文采用了一种新型智能材料IPMC作为触觉显示器的致动器。

The traditional tactile display is complex , bulky , and not potable , so in this paper we use a kind of smart material IPMC as the actuator of tactile display .

当驱动磁场频率小于200Hz时，有偏置磁场时致动器的输出位移与输入电流之间无倍频现象，无偏置磁场时有倍频现象。

There are no double frequency phenomena between the output displacement and input current with bias magnetic field , and double frequency phenomena without bias magnetic field .

研究采用共位配置的分布式压电敏感器和致动器的挠性悬臂梁的振动控制问题，其中敏感器由压电聚乙二烯氟化物薄膜（PVDF）制成，致动器由压电陶瓷（PZT）或PVDF制成。

This paper analyses the vibration control of a flexible cantilever beam with collocated piezoelectric sensors and actuators being the layers msde of piezoelectric ceramic ( PZT ) and piezoelectric polyvinylidene fluoride fluoride ( PVDF ), presents the system model and designs a linear feedback control law .