谐振式压力传感器

提出了一种微机械谐振式压力传感器的新结构。

A novel resonant pressure sensor structure is proposed .

微机械氮化硅梁谐振式压力传感器

The sintering for silicon nitride ceram micromechanical sin beam resonant pressure sensor

对石英圆形膜片的应力应变关系进行了有限元数值计算，得出了正负应力在圆形石英膜片的分界点，为设计SAW谐振式压力传感器的物理结构和合理的安排谐振器的位置提供了依据。

The area of the positive and negative stress is found by finite element method , which provide the theory for arranging the position of two resonators on circle quartz film .

成功研制出硅梁及氮化硅梁谐振式压力传感器初样器件，谐振器空气及真空中的品质因素Q值分别是～2000和～40000，两种梁Q值差别不大。

Silicon and silicon nitride beam resonant pressure sensors with complete packages have been made successfully . The quality factor Q values are about 2000 in air and rise to ~ 40000 in vacuum . Both beams show a little difference in Q values .

扩散硅谐振式压力传感器同频干扰的建模与消除

Model and Elimination for Co-Channel Interference in Diffused Silicon Resonant Pressure Sensor

石英谐振式压力传感器的研制

Design Of Quartz Oscillating Type Pressure Sensor

本文介绍了一种新型的声表面波谐振式压力传感器，压力敏感元件为声表面波谐振器，并组成差动电路形式进行温度补偿。

This paper introduces a new type of surface acoustic wave ( SAW ) resonator pressure sensor .

在谐振器动力学分析的基础上，系统地比较了谐振式压力传感器检测速度谐振频率和检测位移谐振频率的优缺点。

Based on dynamic analysis of resonator , speed resonant frequency detection for the resonant pressure sensor is compared to displacement resonant frequency detection systematically .

报导一种新型的电热激励、压阻拾振的氮化硅梁谐振式压力传感器。

A new type pressure sensor based upon an electro thermally driven and piezo resistively sensed SiN beam resonator is developed using silicon micro machined technology .

而较成功的微机电传感器，如谐振式压力传感器和力平衡式电容微加速度传感器，均采用了微悬臂梁结构。

The most of the successful micro machined sensors adopt the construction of micro cantilevers . For example , the resonant pressure micro sensors , and the micro machined force-balance capacitive accelerometers .

微结构谐振式压力传感器是通过检测其机械谐振器谐振频率的变化来实现压力测量，特点是尺寸小，精度高，稳定性好，易与数字电路接口，具有广阔的应用前景。

A microstructure resonant pressure sensor measures applied pressure by detecting change of resonant frequency of its mechanical resonator . The sensor is characterized by its very small size , high accuracy , excellent stability and convenient interfacing with digital electronics , showing broad application prospects .

谐振式SAW压力传感器敏感元件研究与设计

Study and Design Sensitive Device of Resonance SAW Pressure Sensor

硅谐振式压力微传感器模型与开环特性测试

Model and Open - Loop Characteristics Test of the Silicon Resonant Pressure Microsensor

硅谐振梁式压力传感器模拟计算

Simulation and Calculation on Silicon Resonant Beam Pressure Sensor

微结构谐振梁式压力传感器研究

Study of Microstructure Silicon Resonant Beam Pressure Sensors

本文介绍了作者设计、制作的一种谐振梁式压力传感器。

This thesis represents the design and fabrication of a resonant beam pressure sensor .

硅谐振式压力微传感器闭环系统

Closed-loop system of silicon resonant pressure micro-sensor

对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。

The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper .

利用微电子机械加工技术成功地研制出电热激励、压阻拾振的高精度硅谐振梁式压力传感器。

A thermally excited and piezo-resistor detected silicon resonant pressure sensor of high accuracy has been developed by microelectronic mechanical system ( MEMS ) technology .

谐振式硅微结构压力传感器非线性振动特性研究

Investigation on nonlinear vibration characteristics of resonant silicon microstructure pressure sensor