纳米加工技术

在扫描探针纳米加工技术的基础上，提出了利用原子力显微镜（AFM）来制作高频光栅的新工艺。

On the basis of micro-fabrication technique using the atomic force microscope , a new method was proposed for producing high frequency grating .

因此，如何把AFM检测与传统加工方法结合起来，对于AFM纳米加工技术的发展和应用具有一定的意义。

Therefore , it is meaningful that combine AFM detection and conventional machining methods for the development and application of AFM-based nanolithography techniques .

提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。

A novel MOEMS spatial resonator based on micro-nano machining technology was put forward . The principle and structure of the resonator were introduced .

基于微/纳米加工技术的微型电化学免疫传感器研究

Micro Electrochemical Immunosensor Based on Micro / Nano Fabrication Technology

微纳米加工技术在纳米物理与器件研究中的应用

Applications of micro / nanofabrication in nanoscale physics and devices

超精密加工与纳米加工技术是现代制造技术的前沿，随着加工精度的不断提高，对超精密加工机床的性能要求也随之提高。

Ultra-precision machining and nanotechnology are at the forefront of modern manufacturing industry .

微纳米加工技术及其应用综述

Overview of micro / nanofabrication technologies and applications

蓝宝石单晶纳米加工技术的研究

The Nanometer Machining Technique of Sapphire Single Crystal

开发机械制造的新领域&纳米加工技术梗概

To Develop New Domain of Machine Manufacturing ─ A broad outline of working technology in nanometer scale

微纳米加工技术是一个新兴的综合性的制造技术，有良好的应用前景。

Micro-Meso Mechanical Manufacturing ( M4 ) and Measurement Technology is a rising synthetic technology , with great application prospect .

随着纳米加工技术的发展，纳米结构器件必将成为未来集成电路的基础。

With the development of nano-fabrication techniques , nano-devices will be the basis of the next generation of integrated circuit .

介绍了纳米加工技术，分析评价了国内外超精密加工的现状。

The paper introduces Namith processing technique , giving an analysis and evaluation of the su-per finishing situations both at home and abroad .

近年来，随着微米/纳米加工技术的迅速发展，对加工过程中几何量的检测手段提出了更高的要求。

In recent years , as the rapid development of micro / nano machining technology , it comes higher requirements to measuring instruments in machining process .

本文简介了与机械制造有关的纳米加工技术，讨论了纳米加工技术的物理实质，介绍了与之相关的关键技术及其元器件等。

This paper outlines the working technology in nanometer scale related to machine manufacturing , and introduces its key technologies and its device , and so on .

与此同时，伴随着纳米加工技术的迅速发展，要求更深入地了解纳米器件、结构和材料的性质。

Simultaneously , with the rapid progress in the nanoscale synthesis technology , It is necessary to insight into the properties of nanoscale devices and nanostructures materials .

随着高精度纳米加工技术和集成光学的不断发展，光学元器件的微型化尺寸已经接近光学衍射极限。

With the unceasing development of the high-precision nano fabrication technology and the integrated optics , micro-optical components are close to the size of the optical diffraction limit .

伴随着微纳米加工技术的发展和微小零部件的应用，微小零件表面力学性能的检测与评价技术已成为微小零部件制造过程中的关键。

Following the development of micro-nano machining technique and the application of micro-parts , the measurement and evaluation technique of micro-parts ' surfacial mechanical property have become a key in the machining process .

随着超精密、微纳米加工技术和微机电系统等的发展应用，迫切需要微纳米级表层质量的检测和评价方法。

With the development of the ultra precision machining technology , micro / nano processing technology , micro electromechanical system , etc , the measurement technique and evaluation method for the micro / nano surface quality are extremely needed .

随着微电子工业和纳米加工技术的飞速发展，对超高精度的定位基准的要求也越来越高，绝对坐标系下的参考基准是非常重要的。

With the development of micro fabrication and nano technology , the demand for ultrahigh resolution positioning is becoming more and more important . It is also very important to provide a zero reference signal for absolute measurement in these areas .

本文分析和讨论了目前纳米加工技术应用的现状和问题，提出应用扫描探针显微技术原理于材料的纳米加工，实现可在原位进行材料去除，实用且可靠的纳米加工方法；

Nanometer scale machining used in engineering has been discussed in this paper , and a new method to cut material and to measure it on line at nanometer scale has been developed , by using SPM ( Scanning Probe Microscope ) in machining .

使用SPM的纳米级加工技术新进展

Advances in Nano-Machining by Using SPM

纳米级加工技术概述

Introduction to Nano - processing Technology

在食品领域，纳米食品加工技术、纳米营养素制备技术、纳米食品包装、纳米检测技术成为研究热点。

Nanofood processing , nanonutriment preparation , nanomaterial packaging and detection are the hotspot research in the food industry .

电子束光刻技术是纳米级加工技术的主要手段，在纳米器件加工、掩模制造、新器件新结构加工中扮演举足轻重的角色。

As a main method of the nanometer level processing technologies electron beam lithography acts the pivotal role in nanometer component processing , mask fabricating and novel device novel structure manufacture .

微纳米加工与检测技术进展

Progress of Micro - Meso Mechanical Manufacturing and Measurement Technology

以原子光学为基础的原子光刻技术是一种新型纳米结构的加工技术。

Atom lithography based on atom optics is a new method of fabricating nanometer structure .

纳米加工是纳米技术的核心，也是实现下一代纳米器件的关键。

Nanofabrication is the key issue of nanotechnology , and also the critical event of achieving the invention of nanometer device .

纳米级加工、测控技术及其应用

Nano Machining , Measurement , Control and the Applications

块状纳米材料的精密加工技术的研究

Study on Precision Machining Process for Nano-material Lump

纳米加工精度是纳米技术发展水平的标志。然而，目前其发展受到测量技术及加工理论的制约，特别是缺乏对亚表面变形机理的研究。

Its accuracy has become an indicator of the development level of nano-technology . However , the development of nano-machining technology is restricted with processing theory and measurement , especially with the lack of subsurface formation mechanism .