真空吸盘

而R轴采用与Y轴相同的驱动方式，同时其前端安装了真空吸盘，用于抓取工件。

The driven mode of the axis of R is same to that of Y - Axis .

CMP加工中的真空吸盘区域压力控制技术

Zone Back pressure Control Using for Vacuum Carriers in CMP

并应用VC++6.0编程技术和OpenGL三维图形库开发了硅片磨削面型仿真软件，对真空吸盘修整面型以及硅片自旋转磨削面型进行了计算机仿真和预测；

Through the model , computer simulation software about ground wafer shape is developed with VC + + 6.0 and OpenGL .

真空吸盘的原理、构造和使用

The Principle , Construction and Operation of Vacuum - Suction - disk

无源真空吸盘爬壁机器人动力学分析

Dynamics Analysis of the Passive Absorption Wall Climbing Robot

这是起重机配件非接触式真空吸盘。

This is a non-contact vacuum crane accessory sucker .

真空吸盘式爬壁清洗机器人的研究与开发

Research and development of a wall-climbing robot with vacuum suckers for glass cleaning

一根机械放置手臂使用真空吸盘抓起芯片。

A placing arm , that uses a vacuum , picks up the chip .

真空吸盘的设计与应用

The Design and Application of Vacuum Cupule

通过对硅片夹持系统方案的分析，选用多孔陶瓷真空吸盘，并在此基础上研制了真空夹持系统。

According to schemes analysis , vacuum chuck with porous ceramic is selected for the vacuum clamping system .

气旋式非接触真空吸盘作为一种新兴的气动执行元件，可以在对工件进行吸取和搬运的时候与工件保持非接触状态。

As a novel pneumatic actuating component , Non-Contact Vortex Vacuum Cup could keep non-contact status when picking workpiece .

真空吸盘布置在高强度合金或碳纤维材料制成的端拾器支架上。

The vacuum suction cups are arranged in the tooling bracket which is made of high-strength alloy or carbon fiber material .

完成了分体式多孔陶瓷真空吸盘的结构设计，该吸盘具有结构简单、制造方便、成本低廉和可重复使用等特点：设计出的真空夹持系统，可实现硅片磨削时所要求的功能；

The vacuum chuck is designed as detachable structure , with characters of simple structure , easy manufacturing , low cost and reusable , etc.

真空吸盘真空度的测量使用扩散硅压力传感器，实时测量出真空度的大小，保证硅片在加工过程中可靠夹紧。

A silicon diffusion pressure sensor is used to measure vacuum degree of chuck table to ensure that wafer is firmly chucked during grinding .

文中首先简要介绍了该机器人的工作原理，其中包括设计思想和自适应式多真空吸盘。

In this paper , the principle of the robot is briefly described first , including its conceptual design , self adjusting multi vacuum sucker and leg walking mechanism ;

此外，硅片通过真空吸盘夹紧，真空吸盘的夹紧力不仅要保证硅片可靠夹紧，而且对硅片加工面形精度有影响。

Besides , wafer is held by vacuum chuck , and the vacuum pressure not only ensures the firmness of the chucked wafer , but also affects wafer surface shape .

机器人采用真空吸盘吸附壁面，利用气动驱动，整个机器人由计算机采用模糊控制方法控制，能携带检测仪器和摄相机等设备进行各种检测。

Driven by pneumatics , equipped with sucker to suck the wall , controlled by computer using fuzzy control method , the robot can take checking equipment or camera along to carry on various checkings .

根据装配现场需求对便携式加工设备进行总体结构设计，综合考虑整机重量和结构刚度的影响，确定真空吸盘底座、支架、滑块和连接块等零部件的结构尺寸和材料，选择动力设备，研制样机。

The structure dimensions and materials of some parts , such as suction cup base , support , slide and connective block , should be determined by considering the impact of total weight and structural stiffness .

本文综合考虑硅片夹持系统中真空吸盘修整参数以及硅片磨削参数等多种因素，建立了硅片自旋转磨削面型的理论模型；

In this paper , based on rotational coordinates method , a theoretical model of ground wafer shape in rotational grinding process is developed in which many critical factors including the parameters of a porous ceramic vacuum chuck dressing and silicon wafer grinding etc.

根据这些要求，自行设计和开发了了硅片超精密磨床监控系统，主要实现磨削力在线监测、真空吸盘的真空度实时监测、硅片厚度在线测量以及机床运动和动作控制等功能。

According to such requirements , a monitor system for wafer-rotating grinding machine is designed and developed , fulfilling functions of on-line monitoring the grinding forces and the vacuum degree of vacuum chuck , in-process measuring the thickness of wafer and controlling the machine movements .

用锉刀将微芯片进样通道的两个终端都削成锐利的进样尖端，在真空吸盘的辅助下经由芯片末端的检测池将蛋白质和胰蛋白酶溶液吸入到含电极的主通道中。

Both terminals of the injection channel in the microchip were sharpened with a file to form sharp inlet tips to suck protein and trypsin solutions into the electrode-containing channel with the aid of a suction cup via the detection reservoir at the end of the chip .

自适应式多真空室吸盘的研究

Research on Adaptive Multi - Sucking Disc

分析了机器人移动的安全性问题，设计了组合式真空多吸盘配置组内铰接的结构方式，并对真空吸附系统进行了创新设计。

Analysed the safety of mobile robot , then designed combined-type chuck configuration group , and make the way of hinged vacuum adsorption system innovation design .

针对爬壁机器人工作的复杂壁面工况，设计了一种可用于沟槽壁面的自适应式多真空室吸盘。

In connection with the complex working-surroundings of the wall-climbing robot , this paper discusses a kind of adaptive multi-sucking disc , which can be used on the wall with groove .

该专机采用真空负压式吸盘作为夹具，利用真空回路控制工件的紧固和松开。

It adopts vin pad as jig , and uses vacuum circuit to make workpiece fastening all loosening .

两个由电真空装置控制的吸盘打开袋子。

Two suction cups controlled by electronic vacuum device open the bag .

工业自动化生产中，气动真空吸取技术作为吸盘机械手得以广泛应用。

In industry automatic production , vacuum adsorption technology is widely used as the manipulator .

实验目标主要是验证微型真空泵分别驱动真空吸盘、真空夹爪和异形真空吸盘，完成相应零件从指定位置进行抓取和放置的动作；验证检测系统对组片结果的判别。

The main goal is to verify the experimental of drive the vacuum sucker , abnormity vacuum sucker and vacuum claw to assembly automatically by micro vacuum pump , and detection system verification .

针对零件的特征，设计的真空夹持具包括普通真空吸盘、异形真空吸盘和真空夹爪。

The vacuum clamping equipment includes vacuum sucker , abnormity vacuum sucker and vacuum claw .

介绍了硅片真空夹持系统的原理、真空吸盘的修整与检测方法、硅片厚度在线测量系统的原理及调整方法、磨削力在线测量原理等；

The principle of vacuum chuck system , the dressing and testing of vacuum chuck , the principle and adjusting method of silicon wafer on-line test system , and the principle of the grinding force measuring , are introduced .