激光干涉仪

基于DSP的高精度激光干涉仪的研制

Research and Development of Highly Accurate Laser Interferometer Based on DSP

大孔径移相式CO2激光干涉仪

A Large Aperture Phase shifting CO 2 Laser Interferometer

用于CNC位置环测量的外差激光干涉仪的研究

Study on laser heterodyne interferometer for positioning a CNC machine tool

He-Ne拍波激光干涉仪的研究

Research of the He-Ne laser beat-wave interferometer

发现基于正交解调算法的三维（3-D）轮廓术存在的三种主要误差：激光干涉仪的激光散斑造成的误差；

The errors of three dimentioned ( 3 D ) profilometry based on quadrature demodulation are analyzed , and the corrected results are present .

LISA（全称空间天线式激光干涉仪）是一个空间的探测器。

The Laser Interferometer Space Antenna , LISA , is a detector that will fly in space .

氰化氢激光干涉仪测量HL-1装置等离子体电子密度

Measurement of electron density on the HL-1 TOKAMAK using HCN laser interferometer

介绍用于HL-2A偏滤器托卡马克装置的远红外（FIR）激光干涉仪及其在等离子体电子密度测量中的应用。

A reflecting FIR interferometer and measurement of electronic density in HL-2A tokamak were presented in this paper .

用高灵敏度激光干涉仪测量Z-pinch喷气负载质量线密度

Line mass-density measurements of gas puff Z-pinch load using high sensitive laser interferometer

系统的高精度是通过3个微型激光干涉仪的零阿贝误差设置，一个表面传感AFM测头以及两个角度传感器实现。

The high accuracy is obtained by a zero Abbe offset arrangement with three plane mirror miniature interferometers , a surface-sensing probe and two angular sensors .

HCN激光干涉仪

An HCN laser interferometer

用于KT-5C托卡马克等离子体电子密度测量的多道HCN激光干涉仪

A multichannel HCN laser interferometer for electron density measurement on the KT-5C Tokamak

利用InSAR干涉测量区域的数字高程高精度高测速双纵模热稳频激光干涉仪研究

Digital elevation computation by using two pieces of InSAR image Study of High Precision and High Measurement Speed Dual-Longitudinal Thermal Frequency Stabilization Laser Interferometer

创新的设计了基于CPLD的移位相除算法来实现硬件查表，来完成激光干涉仪信号误差修正和相位细分。

The way for hardware look-up table based on shifted divided algorithm by CPLD was designed for the error correction and phase subdivision of the laser interferometer signal . 3 .

针对某低频水平振动校准设备的激光干涉仪，利用NI公司的多功能采集卡，采集激光干涉仪的调制信号及与其同相位的电容式位移传感器的输出信号。

In this paper , aimed to a laser interferometer of a low frequency vibration calibrated device , its modulated signal and the capacitance displacement transducer signal are collected together through multifunction I / O board .

用MJS双频激光干涉仪指导数控机床位置度误差的修正

Correcting Position Errors of NC Machine Guided by MJS Two-frequency Laser Interferometer

用雷尼肖（RENISHAW）激光干涉仪实现线纹尺的动态测量

The Realization of the Dynamical Measurement of Line Standard Using the Renishaw Laser Interferometer

同时，用双频激光干涉仪测量CCD摄像机的移动距离，得到标定所需要的多个特征点在物面中的位置及在对应图像中的坐标位置。

Meanwhile , the exact displacement of the CCD camera can be measured by a double-frequency laser interferometer , the needed coordinates of the feature points in the object plane and in the correlative image plane are gained .

为减小干涉条纹对比度对于软件解调效果的影响，对PGC算法进行了相应改进，提高了激光干涉仪的探测性能。

Improve the PGC algorithm to deduct the contrast of interference stripes effect , so the detection performance of laser interferometer can be enhanced .

自动测量高精度量块的JLG型激光干涉仪

JLG Laser Interferometer for the Automatic Measurement of High Accurate Gage Blocks

结合HP激光干涉仪对测头不同测量范围的标准差与重复性进行校正测量，由校正的结果分析，此测头系统可实现微器件表面3D形貌的微/纳米测量。

By combining with the HP laser interferometer , the standard error and repeatability of probe is calibrated in different measurement ranges . From these calibration results , the probe is adaptive to achieve micro / nano measurment for the 3D profile of microcomponent .

应用SSPDA单频激光干涉仪

Mono-frequency Laser Interferometer Using a SSPDA Device

本人参与了五道DCN激光干涉仪的预研，DCN激光器及光路系统已经设计加工完成，正在对整个干涉仪的干燥系统升级。

Five channels DCN laser interferometer is being pre-study . The DCN laser and optical system has been designed and processed , and the drying system is being developed on EAST .

建立激光干涉仪数据采集系统，用VC编写了测量软件，能够测量目标镜的相对位移，并实现三路激光跟踪仪的同步数据采集。

The data acquisition system of the laser interferometer is set up , and the measuring software based on VC is programmed to measure the relative displacement of the target retroreflector . Furthermore , a synchronous data acquisition system of three laser interferometers is realized .

激光干涉仪参考臂由具有调制和补偿功能的双PZT组构成，分析了双PZT组的最佳组合方式，及其在调制信号和反馈补偿信号作用下对干涉测量仪光程差的改变情况。

The reference arm of laser interferometer was constituted of PZT groups with modulation and compensation function . The optimal combination of PZT groups and the optical path changes induced by modulation signal and feedback compensation signal are also analyzed .

5528A双频激光干涉仪在定位精度检测中的评定软件和扩展

The Judged Software and Its Expansion in Measuring of Position Finding Precision with 5528A Double-frequency Laser Interferometer

分析影响正弦相位调制半导体激光干涉仪测量精度和系统分辨力的因素，提出了用分布布拉格反射半导体激光器DBRLD实现高分辨力亚纳米精度测量的方案。

The factors affecting measuring accuracy and system resolution of the sinusoidal phase modulation laser diode interferometer are analyzed and a scheme for achieving high-resolution subnanometer accuracy measurement by use of Distributed Bragg Reflection Laser Diode ( DBR LD ) is proposed .

结合已研制成功的3～40MHz频差的双频激光器，期望将双频激光干涉仪的测速提升到4m/s或者更高。

Since the dual-frequency laser with 3 ~ 40MHz frequency difference had been invented , the measurement speed of dual frequency laser interferometer was expected to arrive 4m / s or higher .

本文用非对称Abel变换，研制了一套计算机程序，对七道远红外HCN激光干涉仪测量的信号进行数据处理，并在HT-6M托卡马克中获得了等离子体电子密度时空分布的实验结果。

A computer program has been developed using an asymmetrical Abel inversion , The program is applied to processing the data from a 7-channel FIR HCN laser interferometer . In this way , the time-space distributions of plasma electron density in the HT-6M tokamak are derived .

首先，论文总结了国内外斐索型移相式激光干涉仪的发展现状，通过对斐索移相干涉原理的深入研究，提出了口径为100mm的斐索型移相式激光干涉仪设计方案。

It is very significant in practical engineering . Firstly , the article summarized the present development situation of the fizeau phase-shifting laser interferometer , and presented a design of 100 mm fizeau phase-shifting laser interferometer based on the principle of fizeau phase-shifting interferometry .