气瓶柜
- 网络gas cabinet
气瓶柜-
气瓶柜是处理半导体特殊气体的重要装置。
Gas cabinet is an important unit used to handle special gases for semiconductor pro-cess .
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供应特殊气体、气瓶柜、化学产品、半导体设备等。
Specialty gases , gas cabinets , chemical products and Semi-conductor equipment .
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气瓶柜配有检修门。
The cabinets are equipped with service doors .
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特气气瓶柜吹洗系统
A Purging System for Special-Gas Cabinet
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除了仪器空气（厂空气）工厂直接生产外，其余气体都是采用高压气瓶柜供气。
All gases shall be supplied from Pressurized Gas Cylinders except for plant / instrument air that is supplied from the production facilities .