微光学

随着微光学技术的不断发展和成熟，微光学元件（MOE）制作工艺已经成为其应用领域拓展的重要技术瓶颈之一。

With the development of micro optics , fabrication of Micro-Optics Element ( MOE ) has become the bottle neck which limits its application .

微光学自适应单元技术是基于MOEMS工艺的智能化微光学技术，它能实时校正波前像差，保持清晰的成像。

Micro optics adaptive unit technique is a kind of intelligent MOEMS technique , which can adjust wave front aberration and get clear image .

微光学元件阵列面阵LD光束整形及光纤耦合

Beam shaping and fiber coupling for LD stacks with micro-optical elements array

微光学自适应技术中基于PZT薄膜的微反射镜工艺研究

Technical study of micro-mirror based on PZT films in adaptive optics

微机械加工技术的发展为MEMS与微光学技术的结合应用提供了可能。

Micromachining technology offers a wide range of possibilities for the combination of micro optics and MEMS .

微光学技术在惯性约束核聚变（ICF）中的应用

The Application of The Micro - optics in Inertial Confinement Fusion

文章介绍了用于VCSEL与光纤对准的一种新型集成微光学系统。

This paper proposes a new integrated micro-optical system for VCSEL-to-fiber alignment .

用于VCSEL与光纤对准的新型集成微光学系统

An Integrated Micro-optical System for VCSEL-to-fiber Active Alignment

RIE精确传递微光学三维结构于红外材料的方法

The method for transferring micro optical profile into germanium accurately by RIE

微纳米技术的迅速发展促使微机电系统（MEMS）与微光学相结合形成微光机电系统（MOEMS），从而为可编程相位光栅的研究和实现提供了可能。

The rapid development of micro / nano - technology leads to the combination of micro - optics and MEMS , which is referred to as MOEMS .

本文首先对MEMS的一些典型加工工艺以及目前存在的一些MOEMS器件进行了介绍。然后利用传统薄膜工艺和MEMS工艺的结合，设计了两种基于K9玻璃基板的微光学调制器。

In chapter 2 , the typical micromachining technology for MOEMS device is studied and two kinds of micro optical modulators are designed by MEMS technology , especially thin film technology .

谐振式微光学陀螺（ResonantMicroOpticGyro，RMOG）以光波导谐振腔（Waveguide-typeRingResonator，WRR）为Sagnac效应敏感环，相比于光纤陀螺，在小型化和集成化上具有无可取代的优势。

Compared with a fiber optic gyro , a resonant micro optic gyro ( RMOG ) with a waveguide-type ring resonator ( WRR ) has the irreplaceable advantages for miniaturization and integration .

讨论了算法的数值色散、计算空间吸收边界的设置和FDTD计算区稳定电磁场向观察面的传播算法，它们构成严格分析有限口径衍射微光学元件的有效工具。

Minimizing the numerical dispersion in the FDTD calculation region , setting the absorbing boundary and calculating the steady state electromagnetic fields ' propagation from the FDTD region to the observation plane have been discussed in detail .

由PZT薄膜制得的微反射镜单元，具有体积小、精度高、响应快速等优点，能够满足微光学自适应系统小型化和实时性的需要。

Micro-mirror based on PZT thin films has following advantages such as little capacity 、 high accuracy and quick response . This kind of mirror can meet the micro optics adaptive system 's miniaturized and real-time demands in many fields .

实验对飞秒激光与常用的塑料光纤芯材料（PMMA，PC）相互作用机理进行了研究，并最终实现了该有机材料内部微光学器件的刻划。

The interaction mechanism of the femtosecond laser ablation on core materials of POF ( PMMA , PC ) has been studied in the dissertation . Finally , it is realized that same micro-optic components have been fabricated by using femtosecond laser in the polymer materials .

评述了LIGA、DRIE、EDM、微浮雕、折叠法、RPM6种3维成形法，并指出如何组合它们以适应微光学系统、微流体系统、微机构等商品化的配套需要。

Three dimensional fabrication methods , such as LIGA , DRIE , EDM , micro relief , folding and RPM are described . These methods are related for commercialization need of micro optical systems , micro fluid systems and micro mechanisms .

第三章重点介绍了基于分布反馈式（DFB）半导体激光器的光纤气体传感系统的设计，其内容包括：光源的选择、实验主要仪器性能的介绍和自发研制成功的微光学传感单元设计。

The contents include : the choice of light source , experimental introduction of the main instrument performance and the design of micro-optical sensing unit which was spontaneous developed successfully . Fourth , the research and analysis of the optical fiber gas sensing system which was devised were introduced .

微透镜阵列与针孔阵列合成的微光学器件的研制

Development of Micro-Optical Devices Composed with the Microlens and Pinhole Arrays

微反射镜是微光学自适应系统中的基本组成部分。

Micro-mirror is a fundamental part of micro optics adaptive system .

微透镜阵列就是其中一种重要的微光学元件。

The microlens arrays are the important kind of micro-optics elements .

微光学视网膜器件与光学子波图象纹理分割

Micro Retinal Element and Optical Wavelet Transform System for Texture Segmentation

数字光刻及其制作微光学元件的模拟研究

Method and Simulation of Micro Optical Elements Fabricated by Digital Lithography Technology

提出了一种新颖的自由空间微光学互连模块。

A novel micro-optical crossover interconnection package has been proposed .

明胶用于制作保真沟形微光学元件的酶蚀显形技术

Enzyme etching developing Technique for Fabricating Continuous Relief Microoptics Elements

形成连续微光学元件的灰度掩模图形生成方法

Formation Method of Gray-Scale Mask Patterns Used for Producing Micro Optical Elements

计算机源生全息菲涅耳透镜及其在微光学互连中的应用

Computer Generated Holographic Fresnel Lens and Its Application in the Micro-Optic Interconnection

自由空间全交叉微光学互连模块的研究

The Research on Free-space Crossover Micro - optical Interconnection Package

微光学器件灰度掩模制作及应用技术的研究

Research on Gray-Scale Mask Fabrication and Application Technique of Micro Optics Element

微光学机电系统的发展和应用

The Development and Applications of Micro Opto Electro Mechanical Systems

误差扩散法编码设计制作微光学元件

Fabrication of micro optical elements with coding gray-tone mask designed by error-diffusion method