微型机电系统

本文论述微米纳米制造技术的发展过程，微细加工的进展，微型机电系统的概念、主要研究课题，以及它的应用领域。

This paper deals with the process of microtechnology / nanotechnology , micro machining , the concept and main topic of MEMS and other fields .

近年来，微型机电系统技术高速发展，对作为其基础技术的微细加工设备的需求也越来越大。

In the recent years , demands of microfabrication equipment which is a basic technique of MEMS are increasing along with the rapid development of MEMS .

虽然微型机电系统的制造通常使用基于集成电路工艺的平面制造技术，但由于MEMS器件的三维特性，使它与IC的制造有很大不同。

Although MEMS devices are generally fabricated using the surface micromachining technologies that develop from IC fabrication technologies .

概述了开展微型机电系统（MEMS）建模与仿真研究的意义和必要性。

The significance and necessity for developing the study on modeling and simulation of micro electro mechanical system ( MEMS ) were resumed .

微型机电系统（MicroElectro-mechanicalsystem，MEMS）具有非常广阔的应用前景，MEMS的研究涉及器件、材料、工艺、设计方法等方面。

Micro Electro-Mechanical System ( MEMS ) has a huge market in the future and The research of MEMS involves such respects as the device , material , process , design method , etc.

微型机电系统和微型制造技术是一个新兴的技术领域。

MEMS and micro machine technology is a developing field .

微型机电系统技术及其21世纪应用展望

Technology Summary of the MEMS and Applied Prospects for the 21 Century

微型机电系统的建模与仿真研究

Study on modeling and simulation of micro electro mechanical system

微型机电系统在物化分析中的应用

The Application of MEMS in Physical and Chemical Analysis

目前，微小型或微型机电系统产品是高附加值的高科技产品。

At present , microminiature or miniature electromechanical systems products are high value-added high-tech products .

微型机电系统的进展

Advance in Micro Electro Mechanical Systems

微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。

Micro-Electro-Mechanical-System is the integration of mechanical elements , sensors , actuators , and electronics micro-fabrication technology .

三级建模微型机电系统多学科优化设计法基于二级多点逼近优化算法的航天器结构优化设计

Multidisciplinary Optimization Design Method for Three-levels Modeling MEMS Structural Optimization of Spacecraft Based on Two-level Multi-point Approximate Method

微型机电系统是将微结构的传感、致动和控制集于一体的智能微型装置或系统。

Micro Electromechanical System is an intelligent device or system , which integrates the sensing , actuation and control of micro structure .

传感器技术、微型机电系统以及现代网络和无线通信等技术的发展，使具有现代意义的无线传感器网络得到了极大地推动和发展。

With the development of sensor technology , micro electro-mechanical system and modern wireless communication networks , wireless sensor network has developed greatly .

随着传感技术、通信技术和计算机技术的飞速发展以及微型机电系统的日益成熟与完善，无线传感器网络已广泛应用到许多领域。

Wireless sensor network techniques have been promoted by the development of sensor technique , wireless communication technique , micro electronic technology and increasing maturity of micro electronic mechanism system .

该文分析了微型机电系统中产生的一系列特殊效应，介绍了微机电系统中新的设计理论和设计方法，以期建立微机械学理论体系。

The paper analyses a series of special effects produced in micromechanical system and introduces the new theory and designing method in order to set up the theoretical system of micromechanics .

微板结构是微型机电系统的典型结构之一，机电耦合问题也是微机电系统设计中不可回避的多物理场耦合问题，动力学特性直接影响微型机电系统的设计及其工作特性的控制。

The micro plate is a typical MEMS structure . Electromechanical coupling problems are considered as unavoidable multi-physics coupling problems in MEMS . Dynamic characteristics affect the design and working performance of the electromechanical coupled micro system directly .

随着微型机电系统技术、无线通信和数字电子技术的发展，由低成本、低功耗、多功能的无线传感节点组成的无线传感网络得到迅速发展。

With the development of Micro-Electro-Mechanical Systems , wireless communication and digital electronics technology , wireless sensor network composed of sensor nodes which are of low cost , Low power and multifunction has developed in a high speed .

由于铜具有优良的导电、导热性能，目前已经成为互连线的重要材料，广泛应用于大规模集成电路芯片、微电子封装、微型机电系统、太阳能电池等设备中。

Because of excellent electrical conductivity and thermal conductivity copper and its alloys have become important interconnect material , widely used in large scale integrated circuit chip , microelectronic packaging , MEMS , solar cells and other devices .

微电子机械系统（MEMS）是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。

Micro electro mechanical systems ( MEMS ) are the micro mechatronics fabricated by microelectronic technology and micromachining .

微型光机电系统及其制作

Micro - Opto - Electro - Mechanical System and It 's Fabrication

作为一种典型微型光机电系统&微型光谱仪器，具有许多大型光谱仪器所不具备的优点，并有着广泛的应用范围。

As one of the typical MOEMS , the micro-spectrometer has many advantages compared with traditional spectrometers . It can be used in many areas .