微系统技术

微系统技术（连载六）&性能与测试

Microsystem Technologies ( Serials Six ) - Characterization and Testing

微系统技术（连载五）&智能传感器

Microsystem Technologies ( Serials Five ) - Smart Sensors

随着微机电系统（MEMS）设计日趋成熟，度量问题越来越成为微系统技术中的热点。

With the maturing design of micro electrical mechanism systems ( MEMS ), the metrology for MEMS is becoming the hot research in the micro system technology .

微系统技术中的LIGA工艺

The LIGA Technique in Microsystem Technology

随着微系统技术（MST）、微机电系统（MEMS）的产业化，微细加工技术成为机械制造领域新的研究与应用热点。

With the industrialization of micro system technology ( MST ) and micro electro mechanical systems ( MEMS ), micro processing technology becomes a new research and application hot spot in the field of machinery manufacturing .

3）电化学在微系统技术中的应用，包括用于复杂3D-图形微加工的约束刻蚀剂层技术（CELT）；

3 ) Applications of electrochemistry in microsystem : Confined Etchant Layer Technique ( CELT ) for the complex 3D pattern micromachining ;

微系统技术（连载七）－模拟和计算

Microsystem Technology ( Serials Seven ) - Simulations and Calculations

微系统技术（连载二）&微系统采用的新材料

Microsystem Technology ( Serial Two )─ New Materials for Microsystem

微系统技术（连载八）－应用

Microsystem Technology ( Serials Eight ) - Applications

微系统技术（连载四）&封装技术

Microsystem Technology ( Serials Four )── Packaging Technologies

微系统技术（连载九）&发展前景

Microsystem Technologies ( Serials Nine )── Development Perspective

微系统技术及其应用

Microsystem technologies and its application

简要介绍了微系统技术的发展趋势、未来采用的技术特点、价格和主要应用领域。

Development perspective of microsystem technologies , future characteristics of technologies , cost and applications are briefly described .

微系统技术日益广泛地用于医学、生物学、半导体等许多科技和工业领域中，发挥了重要作用。

Micro-systems are more and more widely applied in iatrology , biology , semiconductor , and other science and technology fields having played an important role .

随着传感器技术、微系统技术、无线通信技术以及计算机技术的蓬勃发展，具有现代意义的无线传感网络技术20世纪90年代末首次在美国出现。

With the development of the sensor technology , microsystem and wireless communication technology , the wireless sensor network is arisen in the later of the 20 century .

随着微系统技术的快速发展，聚合物微结构制品在生物医学、环境工程、精密仪器、航空航天和信息通讯等领域得到越来越广泛的应用。

With the rapid development of micro system technologies , micro structure parts are used widely in biomedical science , environmental engineering , precise instrument , aerospace , information communication and so on .

它作为一种新的功能材料可能广泛应用于储能、传感器、电致变色元件、微系统技术、金属腐蚀防护等领域。

As a kind of new functional materials , PAn is promising in the applications to the field of energy storage , sensors , electrochromic displays , microsystem technologies , and corrosion protection etc.

随着微系统技术、半导体技术、计算机技术、通信技术的飞速发展，无线传感器网络的应用范围越来越广，其研究已成为无线网络领域的重要课题。

With the rapid development of semiconductor technology , micro system technology , communications technology and computer technology , the applications of wireless sensor networks has become more and more widespread , its research has become an important topic .

传感和驱动功能是微系统技术的核心，微系统技术的发展要求其材料能对外界信号做出灵敏的响应或输出较大的应力和应变。

The functions of micro actuation and micro sensing are the core of the micro-systems technology . The material of the micro-systems is required to produce sensitive response to an outside signal and to output a greater stress and strain .

阐述了SIP的优势和应用，指出SIP将会为微系统集成技术带来更大的发展。

The advantages and applications of SIP are given . Thedevelopments of micro-system integrated technology which SIP will bring about are suggested .

随着生物工程、微电子机械技术（MEMS）的发展和微系统加工技术的成熟，用于介入诊疗手术的介入诊疗机器人，已经成为国内外研究的热点问题。

Vascular interventional robot has been become a hot scientific research topic currently at home and abroad with the development of Biotechnology Engineering , MEMS and its processing technology .

微系统集成技术研究的动向

Progress in Microsystems Integrated Technology

微电子机械技术的发展和微系统加工技术的成熟，使上述的要求成为可能。

The State-of-the-Art of Micro Electro Mechanical Systems The MEMS technology makes the device smaller and smaller .

信息化和绿色制造是新世纪制造业的主要特征，仿生制造是新兴的前沿，纳米和微系统制造技术是时代对机械制造业赋予的使命。

Informationization and green manufacturing are main features of the manufacturing industry in the new century , bionic manufacturing is a burgeoning frontier , and nanometer and micro system manufacturing are mission given by the era to the machine manufacturing industry .

分析了作为现阶段微系统主流制造技术的微电子IC工艺的优缺点；

This paper analyses the advantages and disadvantages of micro electronics ' IC technics , the main manufacturing method of micro system at present .

文章结合中国科学院上海微系统与信息技术研究所的工作，综述了SiGe-OI材料研究情况和应用前景，详细介绍了其主要的制备方法，最后报道了作者在SiGe-OI材料研究上的一些实验结果。

We review the resent research on SiGe-OI , its applications and fabrication , including some results of our own work .

生物降解微生态系统优化技术的基础研究

Preliminary Studies on the Optimization Technique of Microecosystem in Biodegradation Processes

微流体系统驱动技术的研究进展

Research on the Driving-Methods of Micro-Fluidic System

过去十年中，微系统工程的技术优势在发展速度和新应用数目方面，给人非常深刻的印象。

Over the past decade , technical advantages of Micro Systems Engineering in development speed and new application numbers give us a very deep impression .

微嵌入式系统Web服务器技术

On the technique of the Web server in the micro - embedded system