磷硅玻璃

介绍了在硅微机械加工的牺牲层释放中，氢氟酸（HF）腐蚀磷硅玻璃（PSG）模型的建立过程，详细阐述了PowerLaw模型。

A basic model of sacrificial layer-phosphosilicate-glass ( PSG ) etching was introduced , and Power law model was elucidated in details .

次大气压硼磷硅玻璃（简称SABPSG）开始凭借其优良的性能被广泛应用于0。

With the excellent performance sub-atmospheric pressure boron phosphorus silicon glass ( SABPSG ) has been widely applied in the DRAM semiconductor manufacturing of0 .

硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应

Electron and Ion Irradiation Effects in AES Analysis of BPSG Films

磷硅玻璃钝化度和可动离子界面陷阱能级分布的研究

The Research of Passivation and Distribution of Trapping Levels of Mobile Ions at Interfaces of Al-PSG ( SiO2 ) - Si System

本文以单晶硅太阳能电池为例，对太阳能电池片生产的各个工段：制作绒面、扩散制结、刻蚀、去磷硅玻璃、镀减反射膜、印刷电极、烧结以及重要工艺参数作了详细的研究。

This paper cite monocrystalline silicon solar cell as an example , studied each sections of solar cell production : making texture , diffusion , etching , depositing the antireflection coating , screen printing and firing , and the important technical parameters in detail .

研究了Eu3+掺杂铌磷与铌硅系列玻璃的发射光谱，声子边带谱及5D0能级寿命，计算了样品的强度参数。

Series of niobate-phosphate and niobate-silicate glasses doped with Eu 3 + ions were prepared . The emission , phonon-side band spectra and fluorescence lifetimes of these glasses were studied and the intensity parameters Ω 2 of Eu 3 + were obtained .