压阻式压力传感器

本文分析了硅压阻式压力传感器输出特性与硅电阻元件温度之间的关系。

In this paper , the relation between characteristics and the temperature of the resistance , element of the silicon piezoresistance pressure transducer is discussed in detail .

压阻式压力传感器的在线综合补偿

On-line comprehensive compensation of piezoresistive pressure sensor

压阻式压力传感器C型结构偏差的有限元分析

Analysis of structural deviation of C-type piezoresistive pressure sensors using the finite element method

根据有限元工具ANSYS的分析结果，设计了一种半导体压阻式压力传感器&绝缘体上硅（SOI）压力传感器，并完成了制作。

According to the results of finite-element analysis with ANSYS , a piezoresistive pressure sensor based on silicon on insulator ( SOI ) was designed .

选用陶瓷压阻式压力传感器测量SF6气体压力，该传感器自带温度补偿、体积小、精度高、稳定性好。

The paper also selects a thermo - sensitive resistance and a piezoresistive pressure sensor to measure temperature and measure of SF6 Gas .

本文在传感器信号调试处理的理论基础上，设计了一套实验室用的对压阻式压力传感器进行校准及DSP（数字信号处理）增益补偿的系统。

So it needs subsequent signal processing technology ( compensation ) . In the paper , according to the theory of the signal detection and processing , we designed a system which is used for calibrating and DSP compensating the piezoresistive pressure sensor in the laboratory .

基于MAX1457实现了一种多路硅压阻式压力传感器温度补偿系统。

A multi-channel silicon piezoresistive sensors temperature compensating system based on MAX1457 is realized .

针对石油化工等领域高温下压力测量的要求，设计了压阻式压力传感器硅芯片，采用SIMOX技术SOI晶片，在微加工平台上制作了硅芯片。

To meet the needs of pressure measurements in harsh environments such as high temperatures and aggressive media , a high temperature pressure sensor was prepared . The strain gauge chip of piezoresistive pressure sensor was designed and fabricated in the micro-machining workshop based on SIMOX technology .

多路硅压阻式压力传感器温度补偿系统的设计与实现

Designing and Implementation of Multi-Channel Silicon Piezoresistive Sensors Temperature Compensating System

一种压阻式压力传感器误差修正的软件方法

An error correction method for piezoresistive pressure transducer by software

压阻式压力传感器零点输出研究

Research of the zero point output of piezoresistive pressure sensor

硅压阻式压力传感器的一种温度补偿方法及其应用

Temperature Compensate Method and Application of Piezoresistive Pressure Sensor

压阻式压力传感器在枪口噪声测量中的应用

Piezoresistive pressure transducer used in measuring gun point noise

硅四端横向压阻式压力传感器的解析模型

An Analysis Model of A Four-Terminal Silicon Piezoresistive Transducer

硅压阻式压力传感器非线性误差校正方法

Nonlinear errors correcting method of piezoresistive pressure transducer

介绍了一种温度补偿方法的基本原理，其解决了微型压阻式压力传感器温补问题；

The basic principle of a temperature compensation method for micro-piezoresistance sensor is introduced .

硅压阻式压力传感器时漂研究

Study on Time-Drift for Silicon Piezoresistive Pressure Sensor

文摘：提出一种可消除热零点漂移的压阻式压力传感器。

Abstract : A pressure sensor which can cancel thermal zero shift is described .

硅压阻式压力传感器温度系数的在线实时补偿

Real-Time Compensation Method on Line for Temperature Coefficient of a Piezoresistive Silicon Pressure Transducer

压阻式压力传感器的温度误差补偿技术及虚拟仪器的组建

Compensation Technology for Thermal Errors of Piezoresistive Pressure Sensor and the Construction of Virtual Instruments

一种压阻式压力传感器温度补偿设计

A Temperature Compensation Design Of Piezoresistance Sensor

压阻式压力传感器在无人机上的应用

Application of piezoresistive pressure sensor in UAV

本文以提高硅压力传感器的性能为研究目标，研究压阻式压力传感器的设计、信号补偿和信号的数字化等问题。

Design , signal compensation and signal digital process of si-piezoresistive pressure sensor are investigated .

此芯片集成化程度较高，可以补偿硅压阻式压力传感器的温度误差和非线性误差。

It is mainly used to compensate temperature shift and non-linearity error of silicon piezoresistive sensors .

其中压阻式压力传感器以其灵敏度高、动态响应好、易于微型化等特点，而获得广泛应用。

Piezoresistive pressure sensor is widely used because of its high sensitivity , dynamic response , easy to miniaturization .

介绍了一种用压力一温度复合传感器对硅压阻式压力传感器温度特性的补偿方法。

A compensate method of piezoresistive pressure sensor temperature characteristic is introduced by using a pressure - temperature complex sensor .

为满足压阻式压力传感器封装工艺中硅芯片外引线键合的要求，研制了热压焊简易装置；

In piezoresistive pressure sensor packaging process , the thermocompression wire bonding was studied to meet the outer interconnection of silicon gauge .

实验结果证明，本系统大大提高了压阻式压力传感器检测精度，研究成果有一定的理论参考价值和实用价值。

The experimental results proved that increased the piezoresistive pressure transmitter examination precision greatly ; the research results had the theory reference value and the practical value .

提出通过对硅压阻式压力传感器的标定数据进行曲面拟合，建立压力传感器的误差模型，提高压力传感器的输出精度。

The error model of the silicon piezoresistive pressure sensor is established by the fitting of the curve surface to the calibration data . The output precision of the pressure sensor is improved .

结合扩散硅压阻式压力传感器的研制.根据硅的压阻效应原理，利用方形硅膜的应力分布公式，论述了提高正方形硅膜压阻式压力传感器灵敏度的几个重要措施。

Based on the principle of silicon piezoresistive effect and the stress distribution formula of the square silicon diaphragm , some important measures must be take to increase the sensitivity of the square silicon diaphragm piezoresistive pressure transducers .