压阻式传感器

给出了纳机电探针阵列与压阻式传感器集成一维阵列器件结构及工作原理；通过理论计算得到该结构的一些主要的特性参数，计算结果与ANSYS模拟结果相符合；

Structure of the NEMS electro-thermal probe array integrated with piezoresistive sensor and its fundmental working principle have been illustrated and the structure parameters have been gained by theoretic calculation , it is agreeable well to the ANSYS simulation result .

纳机电探针阵列与压阻式传感器集成技术研究

Study on the nano electromechanical systems ( NEMS ) electro-thermal probe array integrated with piezoresistive sensor

硅压阻式传感器是一种采用MEMS技术在硅片上集成的压力传感器，广泛应用于各种压力测试设备，诸如汽车胎压、形变压力和各种瞬态压力的测量。

Piezoresistive sensors produced using MEMS technology on a silicon chip , is widely used in all kinds of pressure measurement , such as tire pressure , deformation pressure and transient pressure .

压阻式传感器是近年来发展应用很广的一种压力传感器，本文介绍了美国摩托罗拉公司（MotorolaCo.）生产的MPX横向扩散型硅压力传感器的主要特性。

Piezo-resistance type of sensor is the pressure transducer which has been developed and used in recent years . In this paper it is introduced that the main specifications of the Model MPX transversal diffusion silicon pressure transducer are presented , which is manufactured by American Motorola Co.

一种压阻式传感器温度漂移自动补偿试验系统

A Test System for Automatic Compensation on Temperature Drift of Piezoresistance Transducer

宽温度压阻式传感器的热灵敏度漂移补偿

Thermal sensitivity shift compensation of wide temperature piezoresistive transducer

压阻式传感器计算机辅助分析和设计

Computer aided analysis and design on the piezoresistive transducer

压阻式传感器的应变与温度交叉灵敏度分析

The Analysis on the Crossed Sensitivity of Strain v / s Temperature of Piezoresistive Transducer

压阻式传感器灵敏度特性分析

Analyses of Sensitivity Characteristic for Piezoresistive Sensor

硅压阻式传感器性能影响因素的研究

Research on the Properties of Piezoresistive Transducer

但在硅压阻式传感器的实际应用中存在温度漂移、一致性和非线性等问题。

However , there are temperature drift , consistency and nonlinearity in the actual application .

提出了适用于纺织机械中的并条机、梳棉机等前纺设备的棉条在线检测及纺织质量检测的一种压阻式传感器。

The piezoresistive transducer in monitoring the quality of textile yarn in the textile machines is presented .

硅压阻式传感器的温度特性及其补偿厚膜压阻式传感器用钌系电阻器导电性能研究

Temperature properties and compensation for silicon piezoresistive sensors Study on conductive characteristics of Ru-based resistor for thick-film piezoresistive sensors

硅压阻式传感器是一种新型压力传感器，它具有体积小，频响高等优点。

Silicon piezoresistance transducer is a new type pressure sensor which has smaller size , higher frequency response and other advantages .

根据系统的测试要求选定了具有抗高冲击的三轴压阻式传感器，它完成了压力信号到电信号的转换。

According to the test requirements , we selected the piezoresistive sensor that can resist high impact and can turn the pressure signal to the electricity signal .

基于硅压阻式传感器的工艺过程与后续电路设计，讨论了减小其温度影响的措施。

Based on the fabrication process of silicon piezoresistive sensors and the design of subsequent conditioning circuit , the measures for reducing the temperature effects on the sensors were discussed .

传感器在生产和生活的各个方面应用广泛，而半导体压阻式传感器以其优越的性能成为现代测试领域的主角。

The sensor is widely used in every aspect of production and life , and semiconductor piezoresistive sensor has become the main role in the modern test due to its good performance .

介绍了压阻式传感器的温度补偿原理及补偿方法，详细阐述了硅压阻式加速度传感器3028的补偿方法，给出了实验数据。

The theory and method of temperature compensation of piezoresistance sensor are described in this paper with emphasis on the silicon piezoresistance acceleration sensor 3028 . Experiment data are shown in it .

本系统是利用压阻式传感器感知水位的变化，经A/D转换和单片机系统，实现精确度高、智能化、体积小巧的水位测量系统。

The theory of this measuring system is to utilize the piezoresistive transducer for the sensing of variety of water level and then the micro-voltage signal is converted by the A / D chip and processed by microprocessor .

压阻式压力传感器C型结构偏差的有限元分析

Analysis of structural deviation of C-type piezoresistive pressure sensors using the finite element method

基于MEMS的硅微压阻式加速度传感器设计

MEMS-based Micro-silicon Piezoresistive Accelerometer Design

本文介绍一种低g值双悬臂梁式硅压阻式加速度传感器新结构，通过理论分析与计算，说明该结构的硅压阻式加速度传感器具有良好的输出性能。

A double beam structure piezoresistive accelerometer is presented in this paper , it is prove that the accelerometer has high output properties through theoretical analysis and calculation .

根据有限元工具ANSYS的分析结果，设计了一种半导体压阻式压力传感器&绝缘体上硅（SOI）压力传感器，并完成了制作。

According to the results of finite-element analysis with ANSYS , a piezoresistive pressure sensor based on silicon on insulator ( SOI ) was designed .

论文简述了微电子机械系统（MEMS）技术的发展概况，分析了国内外硅微压阻式加速度传感器研究取得的成果。

The paper discussed the process of Micro-electro mechanical system ( MEMS ) . The production of the research on silicon piezoresistive acceleration sensors home and abroad is analyzed .

升力检测系统包括基于压阻式升力传感器的检测元件和基于PAC的数据采集及记录的控制系统。

The lift measurement system includes lift sensor and data collecting and analyzing control system based on PAC ( PC based PLC ) .

选用陶瓷压阻式压力传感器测量SF6气体压力，该传感器自带温度补偿、体积小、精度高、稳定性好。

The paper also selects a thermo - sensitive resistance and a piezoresistive pressure sensor to measure temperature and measure of SF6 Gas .

本文在传感器信号调试处理的理论基础上，设计了一套实验室用的对压阻式压力传感器进行校准及DSP（数字信号处理）增益补偿的系统。

So it needs subsequent signal processing technology ( compensation ) . In the paper , according to the theory of the signal detection and processing , we designed a system which is used for calibrating and DSP compensating the piezoresistive pressure sensor in the laboratory .

基于MAX1457实现了一种多路硅压阻式压力传感器温度补偿系统。

A multi-channel silicon piezoresistive sensors temperature compensating system based on MAX1457 is realized .

压强的测量采用半导体硅压阻式压强传感器，通过测量MPT进气管路的静压，结合理论分析计算得到MPT谐振腔的总压。

The measurement of pressure was carried out by using semiconductor silicon piezometer . With the static pressure in inlet of pipeline and theoretic analysis we could get the total pressure of MPT .

针对石油化工等领域高温下压力测量的要求，设计了压阻式压力传感器硅芯片，采用SIMOX技术SOI晶片，在微加工平台上制作了硅芯片。

To meet the needs of pressure measurements in harsh environments such as high temperatures and aggressive media , a high temperature pressure sensor was prepared . The strain gauge chip of piezoresistive pressure sensor was designed and fabricated in the micro-machining workshop based on SIMOX technology .