类金刚石膜

荷能粒子在类金刚石膜形成中的作用

Effects of Energy Particles in the Formation of DLC Films

真空阴极电弧沉积法沉积类金刚石膜的研究

Study on the process , properties and structure of DLC films deposited by VCAD method

常压下在PET基材上合成类金刚石膜的研究

Diamond-like Carbon Films Synthesized under Atmospheric Pressure Synthesized on PET Substrates

C2在金刚石（111）表面吸附和离子束辅助沉积类金刚石膜的分子动力学模拟

Molecular Dynamics Simulation of C_2 Adsorption on Diamond ( 111 ) Surface and Diamond-like Carbon Ion Beam Assisted Deposition

类金刚石膜（Diamond-likeCarbon），是一种非晶态的碳材料。

Diamond-like carbon films ( DLC films ) is an amorphous carbon material .

类金刚石膜Ti、Zr掺杂对DLC力学性能的影响

Influences of Ti and Zr Doping on Mechanical Properties of DLC Film

XPS表征类金刚石膜探讨

Discussion of diamond - like carbon films by XPS

表面波等离子体沉积类金刚石膜结构的Raman光谱和XPS分析

Raman Spectra and XPS Analyses of the Diamond-like Carbon Film Deposited by Surface Wave Plasma

真空电弧离子镀膜方法沉积类金刚石膜在PMMA树脂义齿表面的应用

Application of deposited DLC film by vacuum cathodic arc on PMMA resin denture surface

YBCO膜上形成类金刚石膜研究

Research for Films of Diamond Like Carbon on YBCO Film

类金刚石膜在ICF研究中的潜在应用

Potential Applications of Diamond-Like Carbon Films in Inertial Confinement Fusion

W和W/Ti合金靶材的应用及其制备技术靶电流对掺钨类金刚石膜的结构与摩擦学行为的影响

Application and manufacturing technology of tungsten and tungsten-titanium targets Influence of Target Current on the Structures and Friction Behavior of W-doped DLC Films

类金刚石膜（DLC）及其应用

Diamond - Like Carbon Film and Its Applications

CH4或CH4+Ar介质阻挡放电中的离子能量和类金刚石膜制备

Deposition of diamond-like carbon and analysis of ion energy in CH_4 or CH_4 + Ar dielectric barrier discharge plasma

大功率激光制备a-C和a-C∶H类金刚石膜的光学性能研究

Optical Properties of a-C and a-C ∶ H Diamond-like Films Prepared by High Power Excimer Laser Ablation

利用Raman和XPS光谱分析类金刚石膜在退火过程中的化学键合结构变化。

Raman and XPS spectra were used to characterize the change of the chemical bonding structure of the diamond-like films annealed at different temperatures .

类金刚石膜（diamond-likecarbonfilms，简称DLC膜）因其高硬度、高化学稳定性、良好的摩擦磨损性能而得到广泛应用。

Diamond-like carbon ( DLC ) films have wide application in many fields because of its high hardness , chemical stability and well tribological properties .

类金刚石膜的电子能谱（XAES，XPS）研究

Xaes , xps studies of diamond-like carbon film

利用新型中频对靶磁控溅射在硅和M2高速钢基体上沉积了一系列无氢含铬类金刚石膜。

The hydrogen-free diamond-like carbon ( DLC ) films were deposited on substrates of Si and M2 high-speed steel using a new mid-frequency dual-magnetron sputtering .

采用电弧离子镀膜方法，以高纯石墨为碳离子源在PMMA树脂义齿表面沉积类金刚石膜。

By the technology of vacuum cathodic arc deposition , graphite as cathode , Diamond like carbon film ( DLC ) was deposited on PMMA resin denture .

采用高功率和高频率准分子激光器在高真空及H2和N2气氛下沉积类金刚石膜。

Diamond-like films have been prepared by using high power and high frequency excimer laser under a high vacuum , H 2 and N 2 gas environment respectively .

本文探讨了利用微波ECR全方位离子注入技术和等离子增强化学气相沉积技术来制备类金刚石膜。

This paper has discussed preparing Diamond-like Carbon films by means of micro-wave ECR plasma source ion implantation and plasma enhanced chemical vapour deposition .

本文基于产业化应用和改善类金刚石膜与基体结合力为目的，在大型工业用等离子体&离子束增强沉积系统中，获得了DLC膜和梯度复合DLC膜。

DLC films and gradient composition DLC films were deposited on Si substrates in plasma-ion beam enhanced deposition system for the industrial applications and improving the adhesion .

采用End-Hall源沉积类金刚石膜

Experiments on depositing diamond-like-carbon by using source End-Hall

通过制备Ti/TiC和Si/SixNy过渡层在铜基体上沉积类金刚石膜的研究

Studies of Diamond-like Carbon Films Deposited on Copper Substrate With Ti / TiC and Si / Si_xN_y Intermediate Layers

316L不锈钢经类金刚石膜改性后，呈现出疏水性能，表面能比316L不锈钢的小。

After the surface of 316L stainless steel is modified by DLC film , hydrophobic performance appears and surface tension is smaller than that of 316L stainless steel .

尽管各种化学和等离子体辅助CVD和PVD技术已用来沉积类金刚石膜（DLC膜），但其形成机理仍不清楚。

Although synthesis of DLC films by a variety of chemical and plasma assisted CVD as well as PVD techniques has been reported , the formation mechanism is not very clear yet .

介绍了微波ECR等离子体源增强非平衡磁控溅射设备的结构和工作原理，详细叙述了利用该设备制备类金刚石膜的过程。

The configuration and working principle of microwave electron cyclotron resonance ( ECR ) plasma source enhanced unbalance magnetron sputtering equipment was introduced , and the process of preparation of diamond-like carbon ( DLC ) by this equipment was described .

采用脉冲磁过滤阴极真空弧源沉积系统（FCVA）在单晶硅基片上制备了含氟量不同的一系列氟化类金刚石膜（a-C：F）。

Fluorinated diamond-like carbon ( a-C : F ) films with different fluorine content were grown on silicon ( 100 ) substrate by pulse filtered cathodic vacuum arc source technology ( FCVA ) .

分析了物理气相沉积（PVD）技术制备的类金刚石膜和掺杂金属的类金刚石膜的性能，并介绍了类金刚石膜在模具上的应用情况。

Both the properties of diamond - like carbon membrane made by physical vepour deposition ( PVD ) technology and the character of diamond - like carbon membrane of doping metals are analyzed separately , and the application of diamond - like carbon membrane in die is introduced .