变形镜

大冲程低PV值的分立式微变形镜结构设计研究

Segmented Micro Deformable Mirror with Large Stroke and Low PV Flatness

讨论了系统波前哈特曼（Hartmann）探测误差，拟合误差以及变形镜波前复原误差。

The errors of Hartmann wavefront sensing , fitted wave front and deformable mirror wavefront recovery are discussed .

用于激光二极管抽运固体激光器热畸变补偿的MEMS微变形镜设计

Design of MEMS Deformable Micro-Mirror for Compensating Thermally Induced Aberration of Laser Diode-Pumped Solid-State Laser

对基于PZT压电薄膜的变形镜致动器的结构进行了分析，优化了结构参数和驱动方式。

PZT thin film based deformable mirror actuators are analyzed .

基于相移干涉的MEMS变形镜平面度测试系统误差分析与校正

The Analysis and Calibration of Systematic Errors of Phase-shifting Interferometer for Flatness Measurement of MEMS Deformable Mirror

然而，对于表面加工的MEMS微变形镜而言，工艺过程中产生的薄膜残余应力将影响器件的使用性能和工作可靠性，甚至导致器件失效。

However , they suffer from the process-induced residual stresses in MEMS thin films , resulting in poor working performances and reliability .

20单元双压电片变形镜对Zernike像差空间拟合能力的实验研究

Experimental Research on Spatial Fitting Capability to Zernike Aberrations of 20-Element Bimorph Deformable Mirror

分别在功率密度为1.52kW/cm2和1.18kW/cm2的COIL激光辐照下，这两种膜系的变形镜波前变化相应为0.37λ和0.54λ，因此对于变形镜1kW/cm2激光功率密度是安全可靠的。

It is concluded that 1kW / cm 2 laser power density is safe and reliable for these deformable mirrors in COIL laser system . [ WT5HZ ]

本文基于最小二分法，采用MATLAB进行数值模拟，就连续表面分立驱动变形镜对低频位相畸变的拟合能力进行了研究。

Based on the least squares method and numerical simulation by MATLAB , the fitting ability of continuous surface deformable mirror ( DM ) with discrete drive to the low-frequency phase distortion has been studied in this paper .

利用实验室自主研发的集成设计平台，搭建了分立活塞式MEMS微变形镜的系统级行为模型，并对其有效性和准确性进行了验证；

A system-level behavioral model of segmented piston-like micro deformable mirrors was accomplished by utilizing our own-developed integrated design platform for MEMS CAD . Its validity and veracity were verified using both the finite element method and theoretical method .

结果表明，在MCAO中，变形镜的个数越多其等晕角越大。

The advantage of MCAO on enlarging the isoplanatic angle and the conclusion show that the more DMs is used in one MCAO system , the larger isoplanatic angle is obtained .

考虑到由大气湍流造成的光学波前畸变中各泽尼克（Zernike）基元模式的统计权重分布，以及变形镜的实际装夹定位方式，对双压电变形反射镜的优化设计进行了分析。

Considering the statistical weight factors of different Zernike model aberrations caused by atmospheric turbulence , and the different arrangements of mirror positioning , the optimization of the bimorph deformable mirror is analyzed .

还建立了一种根据实际测量的波前相位功率谱数据估测自适应光学系统变形镜需要控制带宽大小和大气湍流格林伍德（Greenwood）频率的方法。

A method of calculating the Greenwood frequency and the needed control bandwidth of the deformable mirror of an adaptive optical system from measured PSDs was discussed .

搭建含有变形镜谐振腔的实验光路系统来控制TEM00模式输出，观测到类似的输出变化。

The same results can be observed according to the TEM00 mode control in the experiment optical system with deformable mirror .

用数字干涉仪测量变形镜影响函数的实验研究

Experiment of Measuring Influence Function of Deformable Mirror Using Digital Interferometer

双变形镜自适应光学全场补偿模拟

Simulation of Full Field Correction with Two Deformable Mirror Adaptive Optics

双变形镜自适应光学系统像差解耦研究

Aberration Decoupling Analysis for Double Deformable Mirrors Adaptive Optical System

20单元双压电片变形镜的性能测试与闭环校正实验研究

Performance test and closed-loop correction experiment of a 20-element bimorph deformable mirror

变形镜参数变化对湍流像差校正效果的影响

Influence of deformable mirror parameter variation on aberration correction for atmospheric turbulence

变形镜极间电压保护网络研究

Protective network research on the actuator voltage of deformable mirror

保护网络通过控制极间电压，保护变形镜。

Protective network can control the voltage between actuators to protect deformable mirrors .

一种新型微变形镜键合技术

The bonding process for a novel micro-deformable mirror

变形镜振幅校正的迭代算法

Iteration Algorithm of Amplitude Correction Using Deformable Mirror

变形镜的定位方式对其校正能力有一定的影响，但影响不大。

And the different ways of mirror positioning will slightly affect its correction capability .

一种提高波前空间校正能力的组合变形镜自适应光学系统

Adaptive Optics System Based on Combinational Deformable Mirror for Improving Wavefront Spatial Correction Capability

变形镜对千赫兹掺钛蓝宝石飞秒激光频谱相位补偿

Deformable Mirror Used for Spectral Phase Compensation in 1 kHz Ti ∶ Sapphire Femtosecond Laser

对所设计的微变形镜进行了器件光学性能和机械性能的仿真与分析；

Then , mechanical and optical performances were simulated and analyzed for the designed structures .

自适应变形镜激光应用技术

Adaptive Mirrors used in Laser Applications

本文采用两个32单元变形镜搭建了一个用于相位校正的组合变形镜。

The CDM AO system for wavefront correction is built , which consists of two32-element DMs .

变形镜波前校正非线性响应剩余位相方差分析

Analysis of the Residual Wavefront Variance Influenced by the Nonlinear Response of Deformable Mirror in Wavefront Correction