光子芯片

准分子激光微加工技术在光子晶体芯片中的应用

Application of Excimer Laser in Fabrication of Photonic Crystal Chip

在芯片结构设计部分，本文提出了三种高效率LED芯片的设计结构，分别是基于双光子晶体的LED芯片，基于微球模型的LED芯片，基于激光剥离衬底的大功率LED芯片。

In the part of structural design , this paper presents three high-efficiency LED chip design structures , which are based on double photonic crystals LED chips , based on the model of micro-LED chips , based on the high-power laser stripping substrate LED chips .

利用传输矩阵方法对一维光子晶体传感器进行了优化设计，从灵敏度以及Q值方面考虑采用了七层光子晶体结构。3、利用BK-7玻璃上制作了一维光子晶体传感器芯片。

Designing and optimizing the surface wave sensor using transmission matrix method and the sensor has seven layers from the sensitivity as well as the Q-value aspect . 3 , The paper has Manufactured the 1-D photonic crystal surface wave sensor by Electron beam sputtering in BK-7 glass .