CO_2 Laser Scanning Optoacoustic Microscope and Its Applications
256×256象素、16级灰度的光声显微镜已使用到检测集成电路的表面或亚表面微细结构。
A photoacoustic microscope with 256 × 256 points and 16-grads brightness has been used to inspect the surface and subsurface microstructure of integrated circuit .
光声显微镜