真空腔体

低温真空腔体结构设计及传热分析

Structure design and heat transfer analysis of cryogenic vacuum chamber

其中低温真空腔体是该系统中关键的装置，为光学元件的低温真空实验提供了必要的条件。

The cryogenic vacuum chamber is the key part of the system , which provides a necessary environment for the cryogenic vacuum experiment of the optical element .

该连铸设备真空腔体由分隔板分成两部分，复合铸型通过隔板相连，并可以实现抽真空和气体压差的控制。

The vacuum chamber is divided into two parts by a panel for the pressure control .

其中的低温真空腔体是针对小型光学元件实验设计的，主要用于测量光学元件的温度场和低温变形，并且把电机产生的局部热量尽可能导出系统。

The cryogenic vacuum chamber , specially designed to experiments of small optical elements , was mainly used to measure the temperature of optical elements and cryogenic distortion and transmitted local heat brought by the electromotor outside the chamber as soon as possible .

为了研制能够替代进口产品的模拟热电制冷CMOS摄像机，在设计时考虑了真空密封腔体、热电制冷系统和配套的一体化电源及控制器等问题。

The problems about design of vacuum sealed container , thermoelectric cooling system , matched power and controllers are considered . A simulation CMOS video camera has been developed replacing the similar imported pro - ducts .

该系统由真空机组、低温真空腔体、防振系统、测量装置等主要部分组成。

The cryogenic optical experiment system is comprised of cryogenic vacuum chamber , vacuum sets , proof vibration sub-system , measuring equipment and so on .

在MEMS封装技术中，MEMS真空封装是一个需要重点研究的课题，因为大多数的MEMS器件都需要真空封装，这些器件内部都具有可动部件或者真空腔体，只有采用真空封装，才能获得较好的性能。

Among the MEMS packaging technology , the vacuum packaging is an important technology needed to be investigated in no time for the needs of most MEMS devices which had locomotory parts or vacuum cavities . Only after vacuum packaging , these devices could achieve good performances .