微机械加工

基于微机械加工技术的传感器是一类很重要的传感器。

Micro-machined sensors based on the MEMS technology are very important sensors .

微机械加工中恒温腐蚀系统的设计研究

The research of the etching system with constant temperature in MEMS manufacture

MEMS传感器件是利用微机械加工技术和微电子工艺技术制作的。

High-temperature MEMS sensors are used micro-machining technology and microelectronics technology to produce .

CVD金刚石薄膜的微机械加工技术研究进展

Progress of the research on the micro-mechanical machining technique for CVD diamond film

然后，采用表面微机械加工技术并以P（100）高阻硅为衬底制作了器件的硅基部分样品并进行了初步测试。

Then , the switch sample based on P ( 100 ) high-resistivity silicon substrate is fabricated by surface micromachining process and the preliminary test result is achieved .

微机械加工技术的发展为MEMS与微光学技术的结合应用提供了可能。

Micromachining technology offers a wide range of possibilities for the combination of micro optics and MEMS .

介绍了在硅微机械加工的牺牲层释放中，氢氟酸（HF）腐蚀磷硅玻璃（PSG）模型的建立过程，详细阐述了PowerLaw模型。

A basic model of sacrificial layer-phosphosilicate-glass ( PSG ) etching was introduced , and Power law model was elucidated in details .

微电子机械系统（MEMS）是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。

Micro electro mechanical systems ( MEMS ) are the micro mechatronics fabricated by microelectronic technology and micromachining .

以体硅为衬底，采用微机械加工技术（MEMS）制作了七通道的可植入到脑皮层的微探针，用于记录神经电信号。

An implantable seven-channel silicon-substrate microprobe was developed for cortical neural signal recordings by micro-electromechanical system ( MEMS ) technology .

用特殊材料PDMS及微机械加工工艺制造出微泵。

The micro-pumps with the material PDMS were fabricated by micromachining processes .

在加工工艺方面，与体微机械加工相比表面微机械加工具有工艺简单，容易与CMOS电路集成等优点。

Compared with bulk micromachining , the surface micromachining has the advantages of low manufacturing cost and easy integration with CMOS circuits .

论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。

In this paper , the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter .

了解微机械加工工艺，采用紫外线曝光、电子束刻蚀、ICP深度刻蚀等工艺并完成硅基微纳结构的加工制备。

Understood micro-maching technology . Fabricated silicon based micro and nanostructures by ultraviolet exposure , electron-beam lithography and ICP deep etching . 3 .

MEMS传感器以硅为材料，采用微机械加工工艺和集成电路制造工艺来制造，实现传感器结构的微小化、集成化。

The MEMS sensor use silicon as the material , and use micro-machining technology and integrated circuit manufacturing technology to achieve miniaturization and integration of sensor structure .

模拟中的Z向加速度计拟采用微机械加工技术在硅片上制作，利用静电悬浮原理平衡质量块，感应加速度并输出信号。

The micromachining technology is suggested to fabricate the accelerometer . Based on the principle of electrostatic levitation , the seismic mass is levitated and feels the acceleration .

定子为平面线圈，是采用硅微机械加工技术和LIGA工艺制作的。

Planar windings manufactured by LIGA technology and silicon micromachine technology are connected with three-phase wye connection .

通讯等应用领域微型化的需求和微机械加工技术的进步推动了基于微机电系统（MEMS）技术的微继电器的快速发展。

The rapid development of MEMS-based microrelay is mostly contributed to the urgent demanding in application such as communication , which is extensively improved by microelectronic technology and microfabrication .

随着MEMS加工技术的发展，表面微机械加工技术已经越来越多的应用于传感器和执行器的制造过程中。

With the growth of micromachining process technologies for microelectromechanical systems ( MEMS ), the surface micromachining technique has been increasingly used in the fabrication of sensors and actuators .

成功运用MEMS微机械加工技术制备出PDMS-PI弹性基底探卡，探针直径25μm，高度65μm。

The PDMS-PI elastic substrate probe card was successfully fabricated by MEMS micro-fabrication technology .

调Q技术是获得脉冲激光输出的关键技术，并广泛应用于微机械加工、激光通信、激光雷达等众多工业军事领域。

Q-switch technology is the key method to obtain pulsed laser , and is widely used in many industrial and military fields such as micro-mechanical machining , laser communication , lidar and so on .

MEMS技术是将常规IC工艺和微机械加工独有的工艺相结合，在生物技术、医疗卫生、空间技术、无线通讯等方面有着巨大的经济与军事价值。

MEMS technology is the combination of conventional IC technology and unique micro-machining technology , which holds great economical and military value in biotechnology , health care , space technology , wireless communications .

在简要介绍了硅微机械加工技术的基础上，详细介绍了微透镜和微反射镜两种MEMS光开关的结构和工作原理。

Brief summarization of silicon micro electro mechanical system ( MEMS ) technologies is presented . Basic structures and mechanism of microlens and micro mirror MEMS optic switches are described in detail .

文章综述了近几年SiC薄膜在MEMS中应用的研究进展，详细讨论了薄膜的性能、主要制备方法及微机械加工技术在SiCMEMS的应用。

In this paper , recent progress of SiC film used in MEMS is reviewed , the characteristics of SiC film , dominating deposition methods and micro mechanical technology are discussing in detail .

随着微电子微机械加工技术的发展，利用光电技术的优点，采用光寻址电位传感器（LAPS，LightAddressablePotentiometricSensor）芯片作为味觉感受和放电响应研究的平台。

With the development of MEMS technology and the advantage of optoelectronic technology , we utilize LAPS ( Light Addressable Potentiometric Sensor ) as the platform for investigation of taste sensation and firing response .

模拟并设计了一种基于表面微机械加工的平面MEM电感，提出了它的等效电路模型并给出模型中参数的提取方法。

This paper simulates and designs planar MEM inductors based on surface-micromachining technology , and presents equivalent circuit models of the inductors and its parameters extraction methods .

在CMOS工艺完成后，辅以与CMOS工艺兼容的体硅微机械加工工艺，制备微桥形式的热绝缘结构，从而方便地实现了CMOS读出电路与探测器阵列的单片集成。

After finished the CMOS process , to realize the monolithic integration of CMOS readout circuits with detector arrays , the thermally insulated microbridge structure could be formed by front-end etching of the substrate using TMAH solution compatible with CMOS process .

本文从体微机械加工、表面微机械加工和LIGA技术三方面论述化学技术在近来新型传感器发展中的技术突破和成果。

On three aspects of micro-machining technologies , buck micro-machining , surface micro-machining and LIGA micro-machining , the paper relates the recent achievements and technical breakthrough of micro sensors and actuators by using novel chemical technologies .

实验结果和分析表明，用这种新的系统或四电极系统进行微机械加工时.加工样品的PN结结面应和腐蚀窗口面积接近，才能确保腐蚀终止指示的明显化。

The experimental results and our analysis suggest that , when microstructures are fabricated by the system of four-electrode system , The PN junction area to be etched in the samples should be close to the etching-window area in order to make the indication of etch-stop clear .

硅铝结构的薄膜热电堆采用半导体集成电路工艺和微机械加工工艺制造。

The thermopile fabrication process combined MEMS technology with semiconductor IC processes .

原子力显微镜传感器的微机械加工技术的研究

Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope