对CMOS流量传感器的传热特性进行了分析研究，提出在器件前后端之间采用隔热结构是提高器件灵敏度的一种有效方法，隔热槽长度是传感器灵敏度的关键参数。
In this paper , the heat transfer characteristics of CMOS flow sensor have been investigated and a method to acquire high sensitive devices has been presented .
长度传感器