微机电系统工程
微机电系统工程
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在表面形貌测量、精密加工、微机电控制系统、生物医学工程以及芯片光刻与封装技术中,高精度的XY二维位移运动工作台具有重要的意义。
The high precision two-dimensional stage is very significant in the field of surface topography measurement , precision machining , Micro-Electro-Mechanical system , Biomedical Engineering and IC / MIMS manufacturing .
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他的研究领域有:生物力学、生物控制学、机电整合及微机电系统于生医工程之应用。机内仪器用微计算机
He has worked in Biomechanics , in Biocybernetics , in Mechatronics and in Microelectromechanical System for Biomedical Engineering applications . built-in instrument microcomputer