微机械

一种Z轴微机械陀螺的自解耦方法研究

Study of a Decoupled Z-Axis MEMS Gyroscope

微机械（MEMS）与微细加工技术

The new development of MEMS and micro-machining

一种中心频率可调节的高Q值微机械带通滤波器初探

Central Frequency Adjustable High Q Value Micromechanical Band Pass Filter

基于DSP的微机械材料力学性能测控系统的硬件设计

Hardware Design of Measurement and Control System based on the DSP for Micro Material Mechanical Property

本文研究了一种新型微机械CMOS热导压力敏感器。

A new micromachined CMOS thermal conductivity pressure sensor has been developed .

压电驱动是微机械系统（MEMS）微执行器最有发展前途的驱动方式之一。

Piezoelectric actuator is one of the most development prospects in MEMS actuators .

为硅基MEMS体加工获得微机械结构提供了一个好方法。

It provides a good method for 3-D fabrication of silicon MEMS devices .

在工艺级中设计了Z轴微机械陀螺的掩膜版图和工艺流程，并进行工艺几何仿真。

In process level design , the layout and process with geometrical simulation was made .

基于AFM的微机械表面抗粘附薄膜性能

Investigation on the Properties of Anti-adhesive Films on MEMS Surfaces by AFM

大楼的两翼完全对称。全对称微机械陀螺全差分检测ASIC设计

Design of Full Differential Detection ASIC for Full Symmetrical Micro Mechanical Gyroscope

介绍了在硅微机械加工的牺牲层释放中，氢氟酸（HF）腐蚀磷硅玻璃（PSG）模型的建立过程，详细阐述了PowerLaw模型。

A basic model of sacrificial layer-phosphosilicate-glass ( PSG ) etching was introduced , and Power law model was elucidated in details .

微电子机械系统（MEMS）是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。

Micro electro mechanical systems ( MEMS ) are the micro mechatronics fabricated by microelectronic technology and micromachining .

硅微机械FP腔器件机电特性模拟

Simulation of Electric-mechanical Characteristics of Micromechanical Device Fabry-Perot Cavity on Silicon

以体硅为衬底，采用微机械加工技术（MEMS）制作了七通道的可植入到脑皮层的微探针，用于记录神经电信号。

An implantable seven-channel silicon-substrate microprobe was developed for cortical neural signal recordings by micro-electromechanical system ( MEMS ) technology .

为了能正确测得微机械力学性能，必需研制一种能适应MEMS材料的多种力学性能的测试仪器。

A kind of test instrument , suitable for measurement of MEMS materials ' mechanical properties , is badly needed .

用特殊材料PDMS及微机械加工工艺制造出微泵。

The micro-pumps with the material PDMS were fabricated by micromachining processes .

基于微机械系统的多芯片组件封装和特性模拟（英文）应用结构导热与CFD耦合的多芯片组件热设计

Characteristics simulation of MEMS packaging using multichip modules technology MCMs thermal design based on thermal-liquid structure and CFD coupling method

提出了利用高速CCD获得光轴颤震偏移矢量、微机械像面移动补偿的空间相机稳定成像新方法。

A new methods of image tremble compensation with high-speed CCD detection of motion vectors and micro mechanic compensation of image plane was proposed .

在加工工艺方面，与体微机械加工相比表面微机械加工具有工艺简单，容易与CMOS电路集成等优点。

Compared with bulk micromachining , the surface micromachining has the advantages of low manufacturing cost and easy integration with CMOS circuits .

提出了一种加入AGC功能的微机械陀螺自激驱动电路的实现方法。

A realization method of the self-excitation drive circuit of the micromachined gyroscope with AGC function is presented .

并通过试验建立了几种微机械性能参数测试方法，并据此对V型电热硅微致动器的一些静态和动态性能参数进行了测试。

Several testing methods of micro scale mechanical behavior parameters are established by test . Statical and dynamic performance parameters of the electrothermal actuator are acquired .

为InP基微机械FP腔的设计优化提供了有效参数依据。

It would be valuable reference for designing and optimizing the InP-based micromechanical F-P cavity devices .

目前在射频领域中运用的MEMS器件主要有微机械开关、微机械电感、可变电容、微机械谐振器、振荡器及滤波器等。

Now among the main RF MEMS devices are μ mechanical RF switches , tunable μ mechanical capacitors ,μ machined inductance and vibrating micromechanical resonators .

首先，对微机械陀螺的随机漂移误差进行了重点研究，建立了微机械陀螺的AR误差模型。

Firstly , the error mode of gyroscope 's random drift is studied deeply and its AR error mode is established according to the measured data .

依据微机械谐振陀螺的结构和工作原理，利用ANSYS有限元仿真软件对微机械谐振陀螺的设计进行了计算和仿真。

The vibratory characteristics of the gyroscope were simulated and calculated with the finite element software ANSYS based on structure and work principle of a micromechanical resonant gyroscope .

微机械Golay腔型非制冷红外探测器研究

Research on Golay-cell Type of Uncooled Infrared Detector Based on MEMS

利用MEMS技术生产的微机械电容式加速度计具有制作工艺简单、温度系数小、稳定性好、阻尼系数容易控制等优点，因而得到了广泛的应用。

Variable-capacitance micromechanical accelerometer developed by MEMS technology is widely used for having simple process , small temperature coefficient , good stability and easily controllable damping coefficient .

基于课题的发展需要提出了用微机械电子系统（MEMS）技术来实现这一模块的微小型化。

According to the development of the project , the article puts forward the technology of micro-electromechanical . systems ( MEMS ) to achieve microminiaturization of this part .

微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。

As a kind of MEMS actuators , micro mechanical radio frequency switch is a representational structure of micromechanical technology , and basis of many micro mechanical components .

定子为平面线圈，是采用硅微机械加工技术和LIGA工艺制作的。

Planar windings manufactured by LIGA technology and silicon micromachine technology are connected with three-phase wye connection .