单晶炉

模糊自整定PID在单晶炉温度控制中的仿真一种模糊自整定PID控制器的设计与仿真

Simulation of fuzzy self-tuning PID control in single crystal growth furnace control system

采用自调整因子混合式模糊PID控制方法，对单晶炉的提拉速度进行控制。

A speed control system of single-crystal furnace lifting mechanism based on mixed self-adjusting fuzzy PID controller is introduced in this paper .

炉室上升式BS法单晶炉的设计

Design of the hearth ascending BS method single crystal growth furnace

CZ单晶炉单晶等径生长计算机控制系统

The Computer Control System for Single Crystal Growing with a Constant Diameter in CZ Crystal Growing Furnace

MCZ单晶炉内磁场的计算

Computation of Magnetic Field in MCZ Monocrystal Furnace

对利用加热器的辐射热在高压单晶炉内合成InP的热场设计作了分析，并给出了实验结果。

The thermal field design is analysed on synthesis of InP formed by the radiant heat of a heater to control phosphorus Temperature and the results of experiment are given as well .

介绍了CZ单晶炉单晶等径生长计算机控制系统的硬件结构和软件设计原理。

This paper describes the computer control system for single crystal growing with a constant diameter in CZ crystal growing furnace , and introduces the design principle of hardware and software .

分析讨论的结果可供设计MCZ单晶炉的磁场发生装置时参考。

The conclusions can be referenced when the equipment generating magnetic field of MCZ monocrystal furnace is designed .

研究了动态矩阵控制（DMC）算法在单晶炉热场温度控制系统中的应用。

The principle of dynamic matrix control ( DMC ) was studied , and the application of DMC algorithm on the temperature control system for thermal field of single crystal growth fumace was given too .

TDR-70A型单晶炉真空系统与充气系统设计

Design of vacuum system and charge system of crystal furnace

这里介绍了炉室上升式BS法单晶炉的设计思路及工作原理，结合晶体生长的特殊工艺要求，分析了其主要结构及特点。

The paper introduces the design ideas and principium of the hearth ascending BS method single crystal growth furnace according to the special technics of crystal ' growing , interprets main structure and characteristic of the equipment .

DL-78型单晶炉的热场和减压工艺

Thermal field and decompression technology of DL-78 monocrystal furnace

本文采用数值积分法计算MCZ单晶炉内的磁场。文中给出了计算程序框图及数值解。

Numerical integral method to compute magnetic field in MCZ monocrystal furnace is applied and the computing program flowchart and numerical solutions are given in this paper .

本文介绍了在国产高压单晶炉中，采取PBN涂层掩蔽碳的措施，利用LEC生长法，生长含碳量低的优质SI-GaAs单晶的工艺和实验结果。

This paper introduces the technology and experimental results of growing high quality SI-GaAs with low carbon concentration by adopting LEC technique and employing graphite components coated with pyrolytic boron nitride in a home-made high pressure puller .

介绍了TDR-70型单晶炉的性能参数及工作原理，结合拉制单晶的特殊工艺要求，分析了其主要结构及特点。

The paper introduces the design characteristic and principium of the puller TDR-70.According to the special technics of crystal growing , interprets main structure and characteristic of the puller TDR-70 .

单晶炉真空系统的除尘技术

Dust Handling Technology for Vacuum System of Single Crystal Growing Furnace

单晶炉坩埚旋转速度控制系统设计

Design of Rotational Speed Control System for Single Crystal Furnace Crucible

浮力提拉单晶炉提拉机构特性分析

Analysis of the Pulling Mechanism of Buoyancy Force Pulling Furnace

水环式真空泵在直拉单晶炉上的应用

Application of Liquid Ring Vacuum Pump in Czochralski Crystal Grower

激光晶体生长单晶炉数据采集系统的设计

Designing of the Data Acquisition System of the Laser Crystal Growth Furnace

基于遗传算法的单晶炉热场温度控制系统

GA-based temperature control system for thermal field of single crystal growth furnace

单晶炉提拉速度控制系统的设计与分析

Design and Analysis of Speed Control System for Single-crystal Furnace Lifting Mechanism

采用有限元法设计了硅单晶炉用永磁磁体。

A permanent magnetic field for mono-crystal furnace was designed .

磷化铟单晶炉用超导磁体装置的调试及实验

The Experimental Study of the Superconducting Magnet Apparatus for InP Crystal Growth

用于单晶炉加热的节能型高频开关电源设计

Design of High-frequency Switching Power Supply For Crystal Growing Furnace

大直径直拉硅单晶炉热场的数值模拟

Numerical Simulation of Thermal Field in a Large-Diameter CZ-Si Single Crystal Furnace

真空炉室是单晶炉的主要部件之一，硅单晶的生长工艺过程都是在真空炉室内进行的。

Vacuum container is important part of the crystal furnace .

基于模糊控制算法的单晶炉等径控制系统设计

Design of the fuzzy control system for the single crystal growth furnace

介绍TDG-28型大直径区熔单晶炉的特点和主要技术指标及性能。

The main technical characteristics of TDG-80 zone melting single-crystal furnace are introduced .

单晶炉的振动分析与计算

Vibration analysis and computation of single crystal furnace