六甲基二硅胺烷
- 网络hmds;Hexamethyldisilazane
六甲基二硅胺烷-
采用无毒、不易燃的六甲基二硅胺烷和氢气在硅（001）单晶上用施加负偏压处理和化学汽相沉积（CVD）方法预沉积定向的βSiC。
A thin heteroepitaxial β SiC layer was deposited on Si ( 001 ) substrate by negative bias treatment and chemical vapor deposition growth using nontoxic , nonflammable hexamethyl disilazane organic compound as the carbon source .
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使用甲基纤维素和六甲基二硅胺烷（HMDS）合成了三甲基硅基甲基纤维素醚（TMS-MC）。
Trimethylsilyl methylcellulose ( TMS-MC ) was synthesized by using methylcellulose and hexamethyldisilane in a homogeneous system .