聚焦离子束

聚焦离子束装置中的图像采集与加工控制

Image acquisition and microfabrication control in FIB equipment

二级透镜聚焦离子束系统及其对中方法

Two lens FIB system and its method of alignment

包括纳米压印、激光干涉光刻、x射线光刻、电子束光刻、聚焦离子束刻蚀等。

The novel methods include nano-imprint , laser interference lithography , x-ray lithography , electron beam lithography , focused ion beam and so on .

聚焦离子束（FIB）技术及其在微电子领域中的应用

Focusedion beam technology and its applications in the field of microelectronics

聚焦离子束（FIB）刻蚀在光电子器件方面的应用

The application of focused ion beam etching to optoelectronic devices

利用聚焦离子束刻蚀的方法在SOI（SilicononInsulator）基片上制备了W3型二维光子晶体直波导。

Using focused ion beam lithograph , we fabricated W3 straight waveguide in two_dimensional photonic crystal slab on SOI ( silicon on insulator ) wafer .

使用极细的聚焦离子束，FIB技术可以进行比从前更加精确的产品失效分析。

Using a finely focused ion beam , FIB technology can perform product failure analysis at a detail much finer than previously possible .

液态金属离子源（LMIS）的亚微米聚焦离子束（FIB）在现代分析技术和微细加工等领域有很多应用。介绍一种计算机控制的快速、灵活、准确的束斑测量方法；

Focus ion beam ( FIB ) with liquid metal ion soure ( LMIS ) has many applications in modern instrumental analysis and microfabrication .

为了适应大规模集成器件制作工艺发展的需要，开展了液态金属离子源（LMIS）和聚焦离子束（NB）的研究。

Investigation on liquid metal ion source ( LMIS ) and focused ion beam ( FIB ), has been started to meet the need in the development of VLSI .

聚焦离子束（FIB）技术被认为是制备基于自旋阀磁电子器件和修饰薄膜材料磁性能的一种比较便捷的方法。

Among the preparation methods of spin-valve magnetic electronic devices , focused ion beam ( FIB ) is considered to be a convenient way to prepare electronic devices and modify magnetic properties of magnetic thin film materials .

采用聚焦离子束（FIB）方法制备了合金化热镀锌IF钢横截面TEM试样，研究了镀层中Γ1相显微结构，得到了Γ1相选区电子衍射花样（SADPs）。

A series map of selected area electron diffraction patterns ( SADPs ) of Γ 1 phase in commercial galvannealed IF steel sheets were investigated by transmission electron microscopy ( TEM ) . The cross-sectional TEM specimen was prepared using focused ion beam ( FIB ) technique .

亚微米聚焦离子束系统的合轴技术及聚焦检测技术

Alignment technique & focusing detection technique of an sub-micron FIB system

纳米聚焦离子束系统液态金属离子源的研制

Development of Liquid Metal Ion Source for Nanometer Focused Ion Beam System

微波离子源聚焦离子束光学系统的研究

Study of focused ion beam column with microwave ion source

高性能聚焦离子束技术的应用

The application of high resolution focused ion beam ( fib ) technique

聚焦离子束微细加工技术实验研究

Experimental studies on microfabrication process with focused submicron ion beam

新一代微细加工的手段聚焦离子束技术及组合系统

A New Method for Microfabrication Focused Ion Beam Technology and Combination System

亚微米聚焦离子束的像散检测与校正技术

Astigmation Detection and Correction Technique for Micron Focused Ion Beam

基于聚焦离子束注入的微纳加工技术研究

Fabrication of micro / nano structures using focused ion beam implantation technology

聚焦离子束溅射刻蚀与增强刻蚀的性能研究

Investigation of Focused Ion Beam Sputtering Etching and Enhanced Etching

基于聚焦离子束技术的微刀具制造方法及关键技术的研究

Study on Micro-tools Fabrication by Focused Ion Beam Technology and Key Techniques

微机控制聚焦离子束扫描装置的研制与实验

Development of computer - controlled focused ion beam scanning system

新一代微分析及微加工手段&聚焦离子束系统

A New Method for Microanalysis and Micromachining & Focused Ion Beam System

聚焦离子束装置中的工件台及控制系统

The Workpiece-Stage and Control System in Focused Ion Beam Equipment

亚微米聚焦离子束溅射刻蚀的实验研究

Experimental study on the sub-micron focused ion beam etching fabrication

聚焦离子束在光纤探针制备技术中的应用

Applications of focused ion beam in optical fiber probe fabrication

聚焦离子束在精细加工中引起损伤的分析

Analysis of Damage Induced by FIB Irradiation in Microprocess

可变束流二级透镜聚焦离子束系统的设计

Design of two ─ lens focused ion beam system with variable beam current

微米/纳米加工中的聚焦离子束技术

Micro - / Nano-Fabrication Using Focused Ion Beam Technology

对聚焦离子束曝光技术作了介绍。

In this paper , Focused Ion Beam Lithography technology and is introduced .