微机电系统工程

微机电系统工程微机电系统工程
  1. 在表面形貌测量、精密加工、微机电控制系统、生物医学工程以及芯片光刻与封装技术中,高精度的XY二维位移运动工作台具有重要的意义。

    The high precision two-dimensional stage is very significant in the field of surface topography measurement , precision machining , Micro-Electro-Mechanical system , Biomedical Engineering and IC / MIMS manufacturing .

  2. 他的研究领域有:生物力学、生物控制学、机电整合及微机电系统于生医工程之应用。机内仪器用微计算机

    He has worked in Biomechanics , in Biocybernetics , in Mechatronics and in Microelectromechanical System for Biomedical Engineering applications . built-in instrument microcomputer