涡轮分子泵

在未指定时，按三菱重工业株式会社制造的涡轮分子泵配置。

If you have any preference of turbo molecular pump , it could be chosen .

其中，成功研制出我国第一台扫描电子显微镜、第一台商品化氦质谱检漏仪、第一台涡轮分子泵；

For example , KYKY has successfully developed the first domestic scanning electron microscope , the first commercial helium mass spectrometer leak detector , and the first turbo molecular pump ;

用Riccati传递矩阵法求解涡轮分子泵的振动问题

Vibration analyses of a turbo-molecular pump with the Riccati tranfer matrix method

对FB-110型涡轮分子泵，用Riccati方法进行了振动分析，说明其工作转速远离临界转速，因而振动小，可以平稳地运转。

The vibration of a TMP , model FB-110 , is analysed with the Riccati method , which shows that the work speed of FB-110 is very different from its critical speeds , it can operate smoothly .

现代涡轮分子泵的技术现状与展望

The Present Status and the Future Development of Modern Turbomolecular Pumps

蒙特卡罗法计算涡轮分子泵叶列的传输几率

Transmission Probability Calculation of Turbomolecular Pump Vanes Using Monte Carlo Method

介绍了牵引分子泵和涡轮分子泵的抽气原理以及抽气性能的相关计算理论，提出了磁轴承牵引分子泵的概念。

The pumping principles and pumping performance computing theory was introduced .

短叶片涡轮分子泵&一种复合分子泵

A Turbomolecular Pump with Short Blades & A New Hybrid Molecular Pump

涡轮分子泵压缩级叶轮对抽速的影响

The effects of outlet stage on the pumping speed of turbomolecular pumps

立式涡轮分子泵的设计计算

Design and Calculation of a Vertical Type Turbomolecular Pump

间隙对涡轮分子泵抽气特性影响的蒙特卡罗模拟

The Monte Carlo Simulation or influence of Clearance on Turbomolecular Pump Pumping Performance

涡轮分子泵参数化设计软件

Parameterized design software of turbo - molecular pump

涡轮分子泵的内加热除气法

Degassing of turbomolecular pump by inner heating

涡轮分子泵电源原理及维修方法探讨

Maintenance of the Power of Turbomolecular Pump

涡轮分子泵的统计理论

The statistical theory of turbomolecular pumps

涡轮分子泵三维叶列抽气性能简化计算的几率矩阵法

Co-efficient Matrix Method of Simplified Calculation for the Pumping Performance of Threedimensional Blade Arrangement of Turbomolecular Pump

关于涡轮分子泵的一些研究

The Study on Turbomolecular Pumps

涡轮分子泵叶片的微分电路模型以及组合叶轮压缩比的计算

The models of differential circuits for the blades of turbomolecular pump and the calculation of its compression ratio

涡轮分子泵组合叶列几何参数优化设计方法的研究

Research on the Optimized Design Method of the Geometry Specification of the Vane Arrangement of the Turbomolecular Pump

实验结果表明。影响系数法平衡涡轮分子泵是切实可行的，而且残余不平衡响应可低于设计指标的要求。

The experimental results show that the balancing procedure of turbo-molecular pump with influence coefficient method is very practical to use .

采用涡轮分子泵与无油涡旋式真空泵组合方式，完全干燥干净的高真空排气系统。

This high vacuum pumping system is completely dry system because it consists of oil-free scroll vacuum pump ( ISP ) and turbob molecular pump ( TMP ) .

对几种参数化设计方法进行了比较，根据涡轮分子泵的结构特点，开发了简便实用的涡轮分子泵参数化设计软件。

Comparing several methods of parameterized design and according to the turbo-molecular pump 's construction characteristics , a convenient and practicable parameterized design software was developed for turbo-molecular pump .

具体内容包括：首先，对目前涡轮分子泵的三种形式的叶片进行加工工艺分析，完成整体转子的三维建模。

The specific content including : First of all , analysis the three forms of leaf processing of the current turbo-molecular pump accomplished the three-dimensional modeling of the overall rotor .

经过样机实际运行试验，结果表明控制系统工作可靠、使用方便，电机起动平缓，具有较宽的调速范围和较高的稳速精度，制动过程快速平稳，符合涡轮分子泵的运行要求。

The motor starts smoothly , has wide speed range and high steady speed accuracy , braking process is quick and smooth , the control system contents the running characteristic of turbo molecular pump .

为了进一步提高泵的性能，现代涡轮分子泵的叶列形状越来越复杂，因此现有的一些计算方法使用时有一定的困难。

In order to advance the pump performance , the blade arrangement form of the present turbomolcular pump become more and more complex , there are certain problems for the use of some calculation method .

环高真空系统是由一组处于真空室内16个下部舱口内的低温泵和一组处于生物屏蔽层外的附加涡轮分子泵组成的。

The torus high vacuum pumping system consists of a series of internal cryopumps located in most of the lower ports ( up to 20 ) and additional turbomolecular pumps located outside of the bioshield .

对涡轮分子泵无油超高真空系统及溅射离子泵无油超高真空系统的结构及操作方法作了介绍，并对它们相关的特性进行了讨论。

Abstract : The structures and operating methods of turbo molecular pump with non-oil ultra high vacuum system and sputter ion pump with non-oil ultra high vacuum system are introduced , and their relevant characters are discussed .

由于涡轮分子泵在高转速下工作作，其转子的不平衡量引起的振动将会影响分子泵的性能和工作环境，严重时可引起破坏，因此，对分子泵的转子必须经过严格的动平衡。

Due to the necessarily high rotational speeds , vibration caused by unbalance of rotor of a turbo-molecular pump ( TMP ) will influence its performance and working condition , and may cause damage under severe situation .

研究了涡轮分子泵电源制动单元的设计、制动功率和制动电阻的计算方法。为涡轮分子泵选用理想制动电阻提供依据。

This article deals with the design of the braking unit of the power supply of TMPs and the calculation method of their braking power and braking resistance , providing the basis for choosing ideal braking resistance of TMPs .

用特殊工艺制作了一个平面型玻璃微小孔（孔径10～20μm），配合抽速为450l/s的涡轮分子泵，实现高达7个数量级的差分效果。

An extremely small hole of about 10-20 μ m in diameter was made in a glass plate with special technology . A differential action of seven orders in pressure ratio was achieved with this hole and a turbo-molecular pump of 4501 / s.