proof mass

High sensitivity is achieved by main beam and micro beam proof mass structure .

主梁、微梁质量块结构实现了高灵敏度。

The device structure which we called " fence gyro " consists of a proof mass with bars linked up to substrate by suspend springs .

这种我们称之为栅型结构的陀螺由悬空弹簧将具有栅条的检测质量块与衬底相联。

Study on estimation of the proof mass of a MEMS accelerometer

微加速度计摆片质量的测量方法研究

In order to obtain high sensitivity , large proof mass and flexible suspension beam are needed .

为了得到较高的灵敏度，需要制造大质量块和低刚度的支撑梁。

Study on the impact of proof mass on silicon micromechanical gimbal vibrating gyroscope

检测质量对硅微机械框架振动陀螺影响的研究

A three-axis micro accelerometer with a single proof mass and force balance feedback is designed in this paper .

设计了一种具有单一检测质量的力平衡式三轴微加速度计。

Three parts of the architecture was detailed analyzed : Drag-Free control loop , proof mass control loop and satellite attitude control loop .

分析该体系结构下Drag-Free控制回路、质量块控制回路和卫星本体姿态控制回路的组成和实现原理。

Two structures of proof mass are designed to be respectively used in ground environment and space environment , and some key techniques are studied in this paper .

本文针对地面实验和空间应用设计了两种结构的硅微静电加速度计，并对一些关键技术进行了研究。

Inner satellite is a proof mass , flying in the cavity of outer satellite . In nominal state , inner satellite is in the center of outer satellite .

内卫星是一个验证质量，飞行在外卫星的内腔中，标称状态下内卫星处于外卫星腔体中心。

The traditional designs of inertial sensors involve a solid proof mass or rotation part , which have some disadvantages such as low life , low reliability , difficult manufacturing and high cost .

目前商用的惯性传感器一般需要检验质量块或者旋转部件，因此，器件的寿命短、可靠性低、加工困难且成本较高。

The principle of accelerometer is based on the measurement of the relative displacement that arises between the elastically suspended proof mass and the accelerometer frame subject to acceleration .

加速度计是靠感测因惯性力引起的相对位移来测量视加速度的，不能测量真实的重力加速度。

The proof mass of this accelerometer is supported by eight suspension beams located symmetrically on the top / bottom surface of a ( 111 ) silicon wafer .

该加速度计的惯性质量块由同一（111）硅片上下表面对称分布的8根悬臂梁支撑。

Because the mass of gas is small and there is no proof mass , the gas pendulum tilt sensor has large-scale applications for its characteristic of resisting oscillation and shock .

由于没有摆动质量块，而且气体的质量也很小，所以气体摆式倾角传感器具有很强的抗振动和冲击能力，在许多领域都得到了广泛的应用。

The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass , because of system structure , feedback control is the only choice to control the proof mass .

以单自由度硅微振动轮式陀螺仪的检测动极板为控制对象，系统的结构特性决定了只能选择反馈控制方式对其进行控制。

The electrostatic analysis of the gyroscope with fence structure shows that the drives with fence structure can be used to drive and sense motion of the proof mass in the plane of the devices .

对陀螺静电驱动的分析表明，具有栅结构的微机械陀螺，可以运用切向静电力驱动敏感质量块振动，并利用电容面积变化引起电容改变来检测敏感质量块的运动。

First-order equations are derived from the linear approximation of the models . The error is less than 4.0 % , when the displacement of the proof mass reaches 20 % of nominal gap .

在检验质量位移达到20%时，线性模型误差小于4.0%。

Under the molecular flow condition , utilizing the law of cosine in the analysis of the gas damping force to the proof mass in the electrostatic accelerometer , the gas damping force coefficient calculation formula has been conducted .

在分子流状态下，将余弦定律应用于静电悬浮加速度计荷载气体阻尼力分析中，推导出了静电悬浮加速度计中气体阻尼系数的计算公式。

The paper deals with active control of wind induced vibration of flexible civil structures based on proof mass actuators and adaptive filter . It covers the modeling , controller design , digital simulation , actuator manufacture and wind tunnel test .

对基于惯性质量型作动器与自适应滤波技术的前馈控制方法用于柔性建筑结构风振控制进行了研究，涉及建模、控制律设计、数字仿真直至风洞模型试验等各个方面。

It shows that gas film damping force has relations not only with the accelerometer dimensions and velocity of the sensitive proof mass , but also with the factors , such as solid wall material , surface roughness , smooth finish , and so on .

研究结果表明，敏感质量块受到的气膜阻尼力不但与尺寸和速度有关，还与固体壁面的材质、表面粗糙度和光洁度等特性有关。

Diamagnetic levitation micro device with free rotor can cancel the effect of contact friction , which exist in majority micro inertial device whose proof mass is connect with substrate by flexible beams , has the ability to be used as high resolution micro inertial device .

抗磁悬浮转子微器件中转子自由悬浮，从根本上消除了大多数微惯性器件的检测质量块通过支撑梁与衬底相连而存在的接触摩擦的影响，可用于高精度的微惯性器件。

The characteristics and corner of mass media tort litigation in our country . It expatiates how to assign the burden of proof correctly in mass media tort litigation . 4 .

我国新闻侵权诉讼的特点和面临的困境，重点阐述如何正确分配我国新闻侵权诉讼的举证责任。