mems

Development of MEMS at the Turn of the Century

下世纪初微电子机械系统的发展

The Advances in Wafer Bonding and MEMS

晶圆键合技术与微电子机械系统新进展

Research status and new development of MEMS technology

MEMS技术的研究现状和新进展

The Application and Development of MEMS Device in Communication Field

通信领域中的MEMS器件及发展动态

Research on MEMS Device Design , Packaging Process and Application

MEMS器件设计、封装工艺及应用研究

Investigation in data exchange of MEMS integrated design system

MEMS集成设计中数据交换的研究

The Research for MEMS Device Computer-aided Design Method and Simulation

MEMS器件的计算机辅助设计方法和仿真研究

MEMS standard process forms by process flow and layout design rules .

MEMS标准工艺主要由工艺流程以及版图设计规则两部分组成。

The Application of MEMS in Physical and Chemical Analysis

微型机电系统在物化分析中的应用

Advanced Manufacturing Technology IC & MEMS Manufacturing Technology and Its Development Trend

先进制造技术之&IC与MEMS制造技术及其发展趋势

Foreign status of MEMS technology and application in military

国外MEMS技术的现状及其在军事领域中的应用

MEMS and micro machine technology is a developing field .

微型机电系统和微型制造技术是一个新兴的技术领域。

Application and Prospects of MEMS The Development and Application of the MEMS

MEMS的应用及发展前景

Research on Skill Knowledge and Process Simulation-Based Virtual MEMS Manufacturing System

基于技能知识和过程虚拟的虚拟MEMS制造系统研究

MEMS dynamic testing system and data processing

MEMS动态测试系统及其数据处理

Study on New Method of MEMS Monolithic Integration and lts Key Technology

MEMS单片集成新方法及关键技术的研究

The State of the Art in Technologies and Applications of MEMS

MEMS技术及应用的新进展

Measurement Technique of In-plane Motion for MEMS Based on Optical Flow

基于光流技术的MEMS器件平面微运动测量

Measurement System for 3D Static and Dynamic Characterization of MEMS

MEMS三维静动态测试系统

Design and calibration for an inertial measurement unit using MEMS sensors

MEMS传感器的惯性测量模块的设计与初始校准

With the development of science and technology , MEMS has become the important direction of development .

随着科学技术的发展，MEMS已成为当今的重要发展方向。

Development of Small satellite and Micro-satellite Speed up By MEMS Technology

应用MEMS技术加快微小卫星及微卫星的发展

Algorithm of Automatic Optimization of MEMS Devices and Its Realization

MEMS器件自动优化算法及其实现

The connotation and the wide applications of MEMS , the new field .

阐明微型机械新型学科的内涵和广阔的应用前景。

Development Trend in MEMS Manufacturing Technology (ⅰ)

微机电系统的国防应用及其制造技术发展述评（上）

Model order reduction and Simulation of MEMS based on Krylov subspace

基于Krylov子空间法的MEMS降阶建模与仿真

System Dynamics Modelling and Analysis of MEMS Device

MEMS器件的系统动力学建模与分析

Development of MEMS Capacitance Sensor Based on Pressure Artificial Denture

基于义齿压力检测的MEMS电容式压力传感器的研制

It provides practical new technique for high-tech field such as MEMS and optical communication .

为MEMS和光通信部件制造以及其它高科技领域的超精密定位工作台的研制提供实用新技术。

Analysis of Micro Piezoelectric Motor Drive Theory in MEMS

微机械中新型压电微电机致动机理分析