振动陀螺仪

音叉式硅微机械振动陀螺仪的粘滞阻尼研究

Study on Viscous Damping in Silicon Micromechanical Vibratory Gyroscope

设计、制造了一种单片集成三轴硅微机械振动陀螺仪。

A monolithic triaxial micromachined vibratory gyroscope was designed , fabricated and preliminarily tested .

气压对MEMS梳状线振动陀螺仪影响的研究

Pressure Influence Research for MEMS Comb Linear Vibrated Gyroscope

因此，研究气压变化对MEMS梳状线振动陀螺仪的影响是非常必要的。

So it is important to research the pressure influence for the MEMS comb linear vibrated gyroscope .

传感反射以加速度计、振动陀螺仪、力传感器获得的信息为依据，通过上体姿态控制、ZMP控制和落地时间控制实现传感反射控制。

It describes actualization of a sensory reflex , which consists of a body posture control , an ZMP control and a landing time control .

微型梳状线振动陀螺仪的特性研究

Research on characteristic and emulation of MEMS comb line vibration gyroscope

微型线振动陀螺仪中机械静电力耦合变形研究

Mechanical-electrostatic coupling and distortion research for MEMS line vibration gyroscope

高能毫米波振动陀螺仪上用的射频元器件的研制和模拟

Development and simulation of RF components for high power millimeter wave gyrotrons

微型振动陀螺仪驱动电路的设计与优化

Design of Driving Circuit for Microsensor and Its Optimization

壳体加速度对硅微角振动陀螺仪性能的影响

Affection of Case Acceleration on the Performance of Silicon Micromechanical Angular Vibrating Gyroscope

内框驱动式硅微型角振动陀螺仪灵敏度研究

The Sensitivity Study of an Angular Vibratory Micromechanical Gyroscope Driven by the Inner Frame

框架式硅微角振动陀螺仪的数学模型

Mathematical model for frame vibratory micromechanical gyroscopes

双框架硅微型机械振动陀螺仪鲁棒控制研究

Robust Control for Double-gimbal Vibratory MEMS Gyroscope

双框架式振动陀螺仪的系统研究

Research on Dual Frame Vibrating Gyroscope System

粘滞阻尼的研究对硅微机械振动陀螺仪的设计至关重要。

Study on viscous damping is critical for the design of silicon micromechanical vibratory gyroscopes .

改进型双框架式硅微角振动陀螺仪的工作机理及误差分析

Operation Principle and Error Analysis of an Improved Silicon Micromechanical Angular Vibratory Gyroscope with Double Gimbals

因此，如何提高硅微型振动陀螺仪的精度，是它走向市场首要解决的问题。

So we must improve its accuracy and sensitivity before we can put silicon micromechanical vibration gyroscope in the markets .

详细介绍了框架式硅微角振动陀螺仪的工作原理，给出了框架式硅微角振动陀螺仪的工作原理图和结构示意图。

The theory behind the frame vibratory micromechanical gyroscopes is detailed with a sketch of structure and an operating diagram .

本文通过分析温度对梳状线振动陀螺仪的影响，推出了检测轴输出幅值和相位与温度的关系。

The temperatures change influence is analyzed and the relationship between the magnitude and phase of the measurement axis and temperature was derived .

预计在以后的几年里这类新型角速率传感器硅微型振动陀螺仪也会作为一种成熟的产品广泛的应用于军用和民用的许多领域。

With the coming years , this type of sensors-silicon micromechanical vibration gyroscopes-can be widely used in military and civil scopes as stable equipments .

为此本文研究了几种典型的硅微型振动陀螺仪的基本运动规律，建立了相应的数学模型，最后分析了它们的工作规律。

Just for this , in this paper we have presented our dissertations on the fundamental motion laws of some kinds of silicon micromechanical vibration gyroscopes , and have established mathematical models of these gyroscopes and analyzed their fundament working laws .

加工应力对双线振动式陀螺仪谐振频率的影响

Effect of process stress on resonance frequency of the double linear vibratory gyroscope

硅微振动轮式陀螺仪的研究

Research of Silicon Vibrating Wheel Micromechanical Gyro

研究了微机械振动轮式陀螺仪的工作原理和实现方法，提出了保证测量精度，提高动态测量带宽的闭环控制系统。

This paper introduces the principle , sensitivity of the micromachined vibratory wheel rate gyro and develops a close loop control system to improve the accuracy as well as the dynamic properties .

以单自由度硅微振动轮式陀螺仪的检测动极板为控制对象，系统的结构特性决定了只能选择反馈控制方式对其进行控制。

The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass , because of system structure , feedback control is the only choice to control the proof mass .

硅微型梳状线振动驱动式陀螺仪的模型分析

Analysis on Mathematical Model of Lateral Comb Drive Micromechanical Silicon Gyroscope

基于隧道效应振动梁式陀螺仪自检电极设计

Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever

本课题旨在研究一种音叉振动微硅陀螺仪的静电激励系统。

The aim of this thesis is to find out the electrostatic driving system of a silicon micromechanical tuning-fork vibratory gyroscope .

研究了硅微型梳状线振动驱动式陀螺仪的基本结构，详细讨论了它的工作原理。

We have studied the basic structure of the lateral comb drive micromechanical silicon gyroscopes and discussed its working laws in details .

通过硅微型梳状线振动驱动式陀螺仪的结构示意图，介绍了该陀螺仪的工作特点。

By the sketch of structure of lateral comb drive micromechanical silicon gyroscopes , the authors have fully explained the working laws of this kind of gyroscope .