nitrogen trifluoride

Preparation of WO_3 target by using sublimate method Development in methods of producing nitrogen trifluoride

三氧化钨靶的升华制备三氟化氮制备方法概述

Productivity , production technique and purification methods of nitrogen trifluoride are introduced at home and abroad , while the domestic and foreign market of it is analyzed and forecasted .

介绍了国内外三氟化氮的产能、制备技术及纯化方法，同时对国内外三氟化氮市场进行了分析和预测。

Development in methods of producing nitrogen trifluoride

三氟化氮制备方法概述

Three . purity analysis of nitrogen trifluoride

三氟化氮纯度的分析

A new process for purifying nitrogen trifluoride

三氟化氮纯化的新工艺

This paper presents the development and the actual state of nitrogen trifluoride in China , analyzed the market of nitrogen trifluoride and give the advice .

综述了我国三氟化氮的发展和现状，分析了市场形势，并提出了三氟化氮今后发展的对策。

The trace sulfur hexafluoride in high pure nitrogen trifluoride gas was determin by selective ion monitor ( SIM ) mode .

用选择离子监测（SIM）方式测定了高纯三氟化氮（NF3）气体中痕量六氟化硫（SF6）。

The paper described that analytical procedures of main impurities in nitrogen trifluoride by using gas chromatography , correct utilization of certified reference material , analytical result and evaluation of uncertainty .

介绍三氟化氮中主要杂质组分含量的分析方法、标准物质的正确使用方法、杂质含量分析结果以及三氟化氮纯度测量结果不确定度的评价。

Nitrogen trifluoride ( NF3 ) is a toxic , colorless , odorless , nonflammable , oxidizing compressed gas .

三氟化氮（NF3）是有毒、无色、无嗅、不可燃的氧化性压缩气体。

In order to meet the need of semiconductor industry , the applied purification methods for nitrogen trifluoride are : cryogenic distillation , azeotropic distillation , absorption , selective adsorption and the combination of them .

为了满足电子工业对其纯度要求，采用的三氟化氮纯化方法有：低温精馏法、共沸精馏法、吸收法、选择吸附法以及各种方法的联用技术。

Determines Trace Nitrogen Monoxide in Nitrogen Trifluoride by Gas Chromatography-Mass Spectrometry

气相色谱/质谱法测定三氟化氮中痕量一氧化二氮