euv

A new design of complex space soft X-ray and EUV telescope for space observation is reported .

根据空间对日观测的需要，提出了一种复合型宽波段范围的软X射线&极紫外望远镜的设计方案。

Ultra - precision Machining and It 's Application for X-Ray / EUV Optics

X射线&极紫外光学中的超精密加工及其应用

The development of novel coatings with improved EUV performance is presented .

本单位致力于开发在此波段具有更好性能的新型薄膜。

Application of EUV theory in the decision of BOT project contracting

EUV理论在BOT项目承包决策中的应用

Effects of solar activity on EUV absorption processes in the upper atmosphere

太阳活动对EUV辐射在大气中吸收过程的影响

Design of a complex space soft X-ray and EUV telescope

一种复合型空间软X射线&极紫外波段望远镜设计

Measure and Analysis of Discharge Produced Plasma EUV Spectrum

放电等离子体极紫外光谱测量及分析

CCD camera in the EUV spectral region and its spatial resolution test

EUV波段CCD相机及其空间分辨率测试

Development of Laser Produced Plasma Source for EUV Lithography

EUV光刻中激光等离子体光源的发展

An optoelectronic imaging system was designed to image EUV light at 17.1 nm .

设计了17.1nm波段光电成像系统，用于对波长为17.1nm的极紫外光进行成像。

Laser-produced Plasma Soft X-ray and EUV Source with Liquid Jet Target

液体微流喷射靶激光等离子体软X射线&极紫外光源研究

VUV / EUV Primary Standard Detector Facility and Transfer Detector Calibration

VUV/EUV标准探测器装置和传输标准探测器的标定

Experimental Study of Radiation Characteristic of Mo / Si Multiplayer Mirror in EUV Range

极紫外波段Mo/Si多层膜反射镜辐射特性实验研究

Analysis of the reflective performance of EUV multilayer under the influence of capping layer

帽层对极紫外多层膜反射特性影响分析

The Simulation of X - ray and EUV Spectra of Be - like O Ions

类铍氧离子X射线及EUV光谱理论模拟

Manufacture and measurement of SiC / Mg EUV multilayer mirrors in different base pressures

不同本底真空度下SiC/Mg极紫外多层膜的制备和测试

It is the capillary discharge EUV source that exhibits higher output power and conversion efficiency of energy .

毛细管放电极紫外光源具有较高的输出功率及能量转换效率，是极紫外光刻的首选曝光光源之一。

Optimization design and preliminary fabrication of non-periodic multilayers in EUV and soft X-ray region

极紫外与软X射线非周期多层膜优化设计及初步研制

This is the first successful trial of the EUV magneto optical effects in laboratories .

这是EUV波段首次利用激光等离子体光源成功进行的磁光效应测量实验。

Research on the achievement of EUV lasers by hollow-core plastic photonic crystal fibers

用空芯塑料光子晶体光纤获得极紫外波段光源的研究

Effect of proton irradiation on transmittance of Al filter at EUV waveband

质子辐照对极紫外波段滤光片透过率的影响

These productions set a solid base on thorough research of capillary discharge EUV source in the future .

这些成果为今后毛细管放电极紫外光源的深入研究奠定了坚实的基础。

Platform for Measuring the Reflectivity of EUV Multiplayer Films

一种用于极紫外多层膜反射率测量的平台

As one of the core equipments , high pulsed power generator is the power supply of the DPP EUV source .

高功率脉冲电源是DPPEUV光源的能量来源，是光源的核心设备之一。

However , it is difficult to obtain high-power , high quality EUV light which restricted the development of EUVL technology .

但是，限制EUV技术发展的一个主要制约因素是大功率，高质量大功率的EUV光源难以获得。

Secondly , some methods in EUV research along with the results about the coronal loops and their interactions were reviewed .

在第二部分中，回顾了目前紫外线研究的一些方法，而且对与太阳耀斑息息相关的日冕环状结构及其相互作用目前的研究结果进行了简要而全面的调研。

Soft X-ray and EUV monochromator development at NSRL

软X光和极紫外光波段的分光技术

So the pulsed power generator is investigated and designed according to the need of the DPP EUV experiment in this paper .

本文根据DPPEUV光源实验的需要，研究设计满足一定要求的高功率脉冲电源，为DPPEUV光源的研究做实验装置上的准备。

Research on the Measuring Method of the Slope Error of EUV / X-Ray Optical Elements and Measuring Apparatus of the Long Trace Profiler

EUV/X-ray光学元件倾斜度面形误差检测方法与测量仪器长轨面形仪（LTP）的研究

Wafer stage is a key subsystem in the extreme ultra violet lithography ( EUV ) .

工件台系统是极紫外光刻（EUV）的一个关键子系统。