boes

boes

1

We present a novel method for phase correction by using binary optical elements ( BOEs ) .

提出一种使用二元光学器件实现位相校正的新方法。
2

It is pointed out that the linewidth error has very large effect of BOEs diffractive efficiency .

指出线宽误差对二元光学元件衍射效率影响较大。
3

In order to meet the need of the integrated development , this thesis focus on system design method of BOEs , design algorithm of module level , making technologies , and fabrication equipment .

为适应二元光学元件集成化的发展需要，本文在二元光学元件系统设计方法、组件级设计算法理论，工艺加工方法、加工设备等方面展开研究。